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- W2063751316 abstract "A variety of induction-coupled plasma source designs have been characterized for their ability to couple charged species to a lower electrode. Designs can be classified in a spectrum from remote sources, through plasma transport sources, to close-coupled sources. The DC self-bias on a lower electrode at constant bias power is used as a diagnostic of plasma coupling between source and lower electrode." @default.
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- W2063751316 date "2002-08-01" @default.
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- W2063751316 title "Low-pressure plasma sources for etching and deposition" @default.
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- W2063751316 doi "https://doi.org/10.1088/0963-0252/11/3a/311" @default.
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