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- W2063774326 endingPage "978" @default.
- W2063774326 startingPage "974" @default.
- W2063774326 abstract "Abstract The heteroepitaxial growth of cubic silicon carbide (3C‐SiC) on Si(001) at a substrate temperature of 800 °C was investigated using atmospheric‐pressure plasma excited by very‐high‐frequency (VHF) power. The carbonization process of the Si surface was first studied using plasma of He, H 2 and CH 4 mixtures to suppress the undesired influences of the large lattice mismatch between Si and 3C‐SiC. A (001)‐oriented 3C‐SiC layer, with thickness of approximately 3 nm and a root mean square roughness of 0.23 nm, was formed by supplying the optimum VHF power for a H 2 concentration of 10% (H 2 /CH 4 ratio of 40). Following the carbonization process, 3C‐SiC films were deposited from a CH 3 SiH 3 single source or CH 4 and SiH 4 dual sources by varying the atomic concentration ratio (C/Si). The crystal quality of the deposited films was characterized using infrared absorption spectroscopy, transmission electron microscopy and selected‐area electron diffraction. The results showed that increasing the C/Si ratio was essential to improve both the deposition rate and the crystal quality. The 3C‐SiC film deposited at C/Si = 10 exhibited the (001) 3C‐SiC growth epitaxially aligned to the Si matrix, although it included a high density of planar defects originating from twinned 3C‐SiC. Copyright © 2008 John Wiley & Sons, Ltd." @default.
- W2063774326 created "2016-06-24" @default.
- W2063774326 creator A5028615816 @default.
- W2063774326 creator A5050446666 @default.
- W2063774326 creator A5058996204 @default.
- W2063774326 creator A5078145270 @default.
- W2063774326 creator A5088173317 @default.
- W2063774326 date "2008-03-26" @default.
- W2063774326 modified "2023-10-16" @default.
- W2063774326 title "Heteroepitaxial growth of cubic SiC on Si using very-high-frequency plasma at atmospheric pressure" @default.
- W2063774326 cites W1977920155 @default.
- W2063774326 cites W1989147215 @default.
- W2063774326 cites W2001197455 @default.
- W2063774326 cites W2005874465 @default.
- W2063774326 cites W2016190132 @default.
- W2063774326 cites W2018754502 @default.
- W2063774326 cites W2020312790 @default.
- W2063774326 cites W2026900636 @default.
- W2063774326 cites W2032536692 @default.
- W2063774326 cites W2047649702 @default.
- W2063774326 cites W2048563372 @default.
- W2063774326 cites W2050211399 @default.
- W2063774326 cites W2052209466 @default.
- W2063774326 cites W2052352331 @default.
- W2063774326 cites W2054289436 @default.
- W2063774326 cites W2065988531 @default.
- W2063774326 cites W2069374002 @default.
- W2063774326 cites W2069479059 @default.
- W2063774326 cites W2077009280 @default.
- W2063774326 cites W2085323034 @default.
- W2063774326 cites W2087082137 @default.
- W2063774326 cites W2089080093 @default.
- W2063774326 cites W2095439603 @default.
- W2063774326 cites W2147928622 @default.
- W2063774326 doi "https://doi.org/10.1002/sia.2814" @default.
- W2063774326 hasPublicationYear "2008" @default.
- W2063774326 type Work @default.
- W2063774326 sameAs 2063774326 @default.
- W2063774326 citedByCount "2" @default.
- W2063774326 countsByYear W20637743262013 @default.
- W2063774326 countsByYear W20637743262016 @default.
- W2063774326 crossrefType "journal-article" @default.
- W2063774326 hasAuthorship W2063774326A5028615816 @default.
- W2063774326 hasAuthorship W2063774326A5050446666 @default.
- W2063774326 hasAuthorship W2063774326A5058996204 @default.
- W2063774326 hasAuthorship W2063774326A5078145270 @default.
- W2063774326 hasAuthorship W2063774326A5088173317 @default.
- W2063774326 hasConcept C107365816 @default.
- W2063774326 hasConcept C110738630 @default.
- W2063774326 hasConcept C111368507 @default.
- W2063774326 hasConcept C113196181 @default.
- W2063774326 hasConcept C127313418 @default.
- W2063774326 hasConcept C146088050 @default.
- W2063774326 hasConcept C159985019 @default.
- W2063774326 hasConcept C171250308 @default.
- W2063774326 hasConcept C185592680 @default.
- W2063774326 hasConcept C192562407 @default.
- W2063774326 hasConcept C200239111 @default.
- W2063774326 hasConcept C2779227376 @default.
- W2063774326 hasConcept C2780722187 @default.
- W2063774326 hasConcept C43617362 @default.
- W2063774326 hasConceptScore W2063774326C107365816 @default.
- W2063774326 hasConceptScore W2063774326C110738630 @default.
- W2063774326 hasConceptScore W2063774326C111368507 @default.
- W2063774326 hasConceptScore W2063774326C113196181 @default.
- W2063774326 hasConceptScore W2063774326C127313418 @default.
- W2063774326 hasConceptScore W2063774326C146088050 @default.
- W2063774326 hasConceptScore W2063774326C159985019 @default.
- W2063774326 hasConceptScore W2063774326C171250308 @default.
- W2063774326 hasConceptScore W2063774326C185592680 @default.
- W2063774326 hasConceptScore W2063774326C192562407 @default.
- W2063774326 hasConceptScore W2063774326C200239111 @default.
- W2063774326 hasConceptScore W2063774326C2779227376 @default.
- W2063774326 hasConceptScore W2063774326C2780722187 @default.
- W2063774326 hasConceptScore W2063774326C43617362 @default.
- W2063774326 hasIssue "6-7" @default.
- W2063774326 hasLocation W20637743261 @default.
- W2063774326 hasOpenAccess W2063774326 @default.
- W2063774326 hasPrimaryLocation W20637743261 @default.
- W2063774326 hasRelatedWork W1015075493 @default.
- W2063774326 hasRelatedWork W1567094779 @default.
- W2063774326 hasRelatedWork W1828979328 @default.
- W2063774326 hasRelatedWork W1995127628 @default.
- W2063774326 hasRelatedWork W2001702681 @default.
- W2063774326 hasRelatedWork W2003727194 @default.
- W2063774326 hasRelatedWork W2012686915 @default.
- W2063774326 hasRelatedWork W2359558263 @default.
- W2063774326 hasRelatedWork W2366379654 @default.
- W2063774326 hasRelatedWork W4237595100 @default.
- W2063774326 hasVolume "40" @default.
- W2063774326 isParatext "false" @default.
- W2063774326 isRetracted "false" @default.
- W2063774326 magId "2063774326" @default.
- W2063774326 workType "article" @default.