Matches in SemOpenAlex for { <https://semopenalex.org/work/W2064003309> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2064003309 abstract "The performance of a new positive tone novalac-based resist, SYSTEM-9, has been characterized on aCambridge Instruments EBMF-1O.5 electron beam lithography tool. Resist characteristics and the optimumprocessing conditions for a variety of commercially available developers have been investigated. This resistyields relative contrasts of up to 14, sensitivities from 19 to 32 (jtC/cm2) and a good resolution of 0.2 jim.SYSTEM-9 has excellent dry etch resistance. Outstanding applications in submicron micro-electronic devicefabrication are demonstrated." @default.
- W2064003309 created "2016-06-24" @default.
- W2064003309 creator A5014483707 @default.
- W2064003309 creator A5055128689 @default.
- W2064003309 date "1990-05-01" @default.
- W2064003309 modified "2023-09-23" @default.
- W2064003309 title "System-9: a new positive tone novalac-based high-resolution electron-beam resist" @default.
- W2064003309 cites W2992276362 @default.
- W2064003309 cites W2270447996 @default.
- W2064003309 doi "https://doi.org/10.1117/12.20169" @default.
- W2064003309 hasPublicationYear "1990" @default.
- W2064003309 type Work @default.
- W2064003309 sameAs 2064003309 @default.
- W2064003309 citedByCount "0" @default.
- W2064003309 crossrefType "proceedings-article" @default.
- W2064003309 hasAuthorship W2064003309A5014483707 @default.
- W2064003309 hasAuthorship W2064003309A5055128689 @default.
- W2064003309 hasConcept C120665830 @default.
- W2064003309 hasConcept C121332964 @default.
- W2064003309 hasConcept C124952713 @default.
- W2064003309 hasConcept C136525101 @default.
- W2064003309 hasConcept C142362112 @default.
- W2064003309 hasConcept C142724271 @default.
- W2064003309 hasConcept C147120987 @default.
- W2064003309 hasConcept C168834538 @default.
- W2064003309 hasConcept C171250308 @default.
- W2064003309 hasConcept C192562407 @default.
- W2064003309 hasConcept C200274948 @default.
- W2064003309 hasConcept C204223013 @default.
- W2064003309 hasConcept C204787440 @default.
- W2064003309 hasConcept C2779227376 @default.
- W2064003309 hasConcept C2780583480 @default.
- W2064003309 hasConcept C49040817 @default.
- W2064003309 hasConcept C53524968 @default.
- W2064003309 hasConcept C62520636 @default.
- W2064003309 hasConcept C71924100 @default.
- W2064003309 hasConcept C95312477 @default.
- W2064003309 hasConceptScore W2064003309C120665830 @default.
- W2064003309 hasConceptScore W2064003309C121332964 @default.
- W2064003309 hasConceptScore W2064003309C124952713 @default.
- W2064003309 hasConceptScore W2064003309C136525101 @default.
- W2064003309 hasConceptScore W2064003309C142362112 @default.
- W2064003309 hasConceptScore W2064003309C142724271 @default.
- W2064003309 hasConceptScore W2064003309C147120987 @default.
- W2064003309 hasConceptScore W2064003309C168834538 @default.
- W2064003309 hasConceptScore W2064003309C171250308 @default.
- W2064003309 hasConceptScore W2064003309C192562407 @default.
- W2064003309 hasConceptScore W2064003309C200274948 @default.
- W2064003309 hasConceptScore W2064003309C204223013 @default.
- W2064003309 hasConceptScore W2064003309C204787440 @default.
- W2064003309 hasConceptScore W2064003309C2779227376 @default.
- W2064003309 hasConceptScore W2064003309C2780583480 @default.
- W2064003309 hasConceptScore W2064003309C49040817 @default.
- W2064003309 hasConceptScore W2064003309C53524968 @default.
- W2064003309 hasConceptScore W2064003309C62520636 @default.
- W2064003309 hasConceptScore W2064003309C71924100 @default.
- W2064003309 hasConceptScore W2064003309C95312477 @default.
- W2064003309 hasLocation W20640033091 @default.
- W2064003309 hasOpenAccess W2064003309 @default.
- W2064003309 hasPrimaryLocation W20640033091 @default.
- W2064003309 hasRelatedWork W1966114321 @default.
- W2064003309 hasRelatedWork W1969486968 @default.
- W2064003309 hasRelatedWork W1976000749 @default.
- W2064003309 hasRelatedWork W1984700624 @default.
- W2064003309 hasRelatedWork W1991187126 @default.
- W2064003309 hasRelatedWork W1994164260 @default.
- W2064003309 hasRelatedWork W2002752212 @default.
- W2064003309 hasRelatedWork W2012629523 @default.
- W2064003309 hasRelatedWork W2022385805 @default.
- W2064003309 hasRelatedWork W2029597429 @default.
- W2064003309 hasRelatedWork W2065191965 @default.
- W2064003309 hasRelatedWork W2088280212 @default.
- W2064003309 hasRelatedWork W2244635572 @default.
- W2064003309 hasRelatedWork W2466219710 @default.
- W2064003309 hasRelatedWork W2560581523 @default.
- W2064003309 hasRelatedWork W2930930052 @default.
- W2064003309 hasRelatedWork W41803155 @default.
- W2064003309 hasRelatedWork W2752427987 @default.
- W2064003309 hasRelatedWork W2772850041 @default.
- W2064003309 hasRelatedWork W2936452118 @default.
- W2064003309 isParatext "false" @default.
- W2064003309 isRetracted "false" @default.
- W2064003309 magId "2064003309" @default.
- W2064003309 workType "article" @default.