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• W2064125294 abstract "Irradiation of silicon by a pulsed laser induces a surface phase change above a certain threshold. The maximum depth of this phase change has been measured by using the diffusion of dopants in the phase change. By repetitive pulsed illumination the dopant will progressively diffuse towards the maximum depth and will be homogeneously distributed through the thickness of the modified phase. Experimentally, we used a pulsed ruby laser with a 20-ns pulse duration and a repetition rate of 0.16 and 0.03 Hz. A successful comparison with our thermal model calculations was established. This model considers both the temperature dependence of optical and thermal properties of silicon." @default.
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• W2064125294 date "1984-09-15" @default.
• W2064125294 modified "2023-09-25" @default.
• W2064125294 title "Direct measurement of the maximum depth phase change of crystal silicon under pulsed laser irradiation" @default.
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• W2064125294 doi "https://doi.org/10.1063/1.334204" @default.
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