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• W2064220764 abstract "The origin of negative ions in the dc magnetron sputtering process using a ceramic indium-gallium-zinc oxide target has been investigated by in situ analyses. The observed negative ions are mainly O− with energies corresponding to the target voltage, which originates from the target and barely from the reactive gas (O2). Dissociation of ZnO−, GaO−, ZnO2−, and GaO2− radicals also contributes to the total negative ion flux. Furthermore, we find that some sputtering parameters, such as the type of sputtering gas (Ar or Kr), sputtering power, total gas pressure, and magnetic field strength at the target surface, can be used to control the energy distribution of the O− ion flux." @default.
• W2064220764 created "2016-06-24" @default.
• W2064220764 creator A5000977568 @default.
• W2064220764 creator A5013436525 @default.
• W2064220764 creator A5038646221 @default.
• W2064220764 date "2013-07-01" @default.
• W2064220764 modified "2023-10-18" @default.
• W2064220764 title "<i>In situ</i> analyses on negative ions in the indium-gallium-zinc oxide sputtering process" @default.
• W2064220764 cites W1988669945 @default.
• W2064220764 cites W1993149740 @default.
• W2064220764 cites W1994453736 @default.
• W2064220764 cites W1996969330 @default.
• W2064220764 cites W2002512754 @default.
• W2064220764 cites W2003262087 @default.
• W2064220764 cites W2006901569 @default.
• W2064220764 cites W2006983203 @default.
• W2064220764 cites W2008744161 @default.
• W2064220764 cites W2011742325 @default.
• W2064220764 cites W2012979652 @default.
• W2064220764 cites W2018540978 @default.
• W2064220764 cites W2036135923 @default.
• W2064220764 cites W2046786272 @default.
• W2064220764 cites W2050199135 @default.
• W2064220764 cites W2051515376 @default.
• W2064220764 cites W2052283863 @default.
• W2064220764 cites W2055699194 @default.
• W2064220764 cites W2075744876 @default.
• W2064220764 cites W2081231529 @default.
• W2064220764 cites W2118373239 @default.
• W2064220764 cites W4244728800 @default.
• W2064220764 doi "https://doi.org/10.1063/1.4812668" @default.
• W2064220764 hasPublicationYear "2013" @default.
• W2064220764 type Work @default.
• W2064220764 sameAs 2064220764 @default.
• W2064220764 citedByCount "31" @default.
• W2064220764 countsByYear W20642207642014 @default.
• W2064220764 countsByYear W20642207642015 @default.
• W2064220764 countsByYear W20642207642016 @default.
• W2064220764 countsByYear W20642207642017 @default.
• W2064220764 countsByYear W20642207642018 @default.
• W2064220764 countsByYear W20642207642019 @default.
• W2064220764 countsByYear W20642207642020 @default.
• W2064220764 countsByYear W20642207642021 @default.
• W2064220764 countsByYear W20642207642022 @default.
• W2064220764 countsByYear W20642207642023 @default.
• W2064220764 crossrefType "journal-article" @default.
• W2064220764 hasAuthorship W2064220764A5000977568 @default.
• W2064220764 hasAuthorship W2064220764A5013436525 @default.
• W2064220764 hasAuthorship W2064220764A5038646221 @default.
• W2064220764 hasConcept C102931765 @default.
• W2064220764 hasConcept C113196181 @default.
• W2064220764 hasConcept C145148216 @default.
• W2064220764 hasConcept C147789679 @default.
• W2064220764 hasConcept C171250308 @default.
• W2064220764 hasConcept C178790620 @default.
• W2064220764 hasConcept C179104552 @default.
• W2064220764 hasConcept C185592680 @default.
• W2064220764 hasConcept C19067145 @default.
• W2064220764 hasConcept C191897082 @default.
• W2064220764 hasConcept C192562407 @default.
• W2064220764 hasConcept C22423302 @default.
• W2064220764 hasConcept C2779851234 @default.
• W2064220764 hasConcept C43617362 @default.
• W2064220764 hasConcept C535196362 @default.
• W2064220764 hasConcept C543292547 @default.
• W2064220764 hasConcept C550372918 @default.
• W2064220764 hasConcept C61427134 @default.
• W2064220764 hasConceptScore W2064220764C102931765 @default.
• W2064220764 hasConceptScore W2064220764C113196181 @default.
• W2064220764 hasConceptScore W2064220764C145148216 @default.
• W2064220764 hasConceptScore W2064220764C147789679 @default.
• W2064220764 hasConceptScore W2064220764C171250308 @default.
• W2064220764 hasConceptScore W2064220764C178790620 @default.
• W2064220764 hasConceptScore W2064220764C179104552 @default.
• W2064220764 hasConceptScore W2064220764C185592680 @default.
• W2064220764 hasConceptScore W2064220764C19067145 @default.
• W2064220764 hasConceptScore W2064220764C191897082 @default.
• W2064220764 hasConceptScore W2064220764C192562407 @default.
• W2064220764 hasConceptScore W2064220764C22423302 @default.
• W2064220764 hasConceptScore W2064220764C2779851234 @default.
• W2064220764 hasConceptScore W2064220764C43617362 @default.
• W2064220764 hasConceptScore W2064220764C535196362 @default.
• W2064220764 hasConceptScore W2064220764C543292547 @default.
• W2064220764 hasConceptScore W2064220764C550372918 @default.
• W2064220764 hasConceptScore W2064220764C61427134 @default.
• W2064220764 hasIssue "1" @default.
• W2064220764 hasLocation W20642207641 @default.
• W2064220764 hasOpenAccess W2064220764 @default.
• W2064220764 hasPrimaryLocation W20642207641 @default.
• W2064220764 hasRelatedWork W1970983245 @default.
• W2064220764 hasRelatedWork W2009581736 @default.
• W2064220764 hasRelatedWork W2054657488 @default.
• W2064220764 hasRelatedWork W2069824662 @default.
• W2064220764 hasRelatedWork W2314803793 @default.
• W2064220764 hasRelatedWork W2367161266 @default.
• W2064220764 hasRelatedWork W2593975047 @default.
• W2064220764 hasRelatedWork W2903829653 @default.
• W2064220764 hasRelatedWork W2955447263 @default.
• W2064220764 hasRelatedWork W4252960791 @default.
• W2064220764 hasVolume "103" @default.

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