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• W2064305018 startingPage "4222" @default.
• W2064305018 abstract "Single- and multiple-energy Fe, Cr, and V ions were implanted into InGaAs. Annealing of the implanted InGaAs samples caused a redistribution of the implanted atoms, as determined by secondary ion mass spectrometry. Coimplantation of Fe with P did not prevent this redistribution. A transport equation calculation of Fe-implantation-induced stoichiometric disturbances in InGaAs was done. The lattice quality of implanted InGaAs was investigated by photoreflectance measurements. Fe-implanted InGaAs has a resistivity close to the intrinsic limit, whereas Cr- and V-implanted InGaAs have a lower resistivity than the unimplanted material." @default.
• W2064305018 created "2016-06-24" @default.
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• W2064305018 date "1991-04-15" @default.
• W2064305018 modified "2023-09-26" @default.
• W2064305018 title "Transition metal implants in In0.53Ga0.47As" @default.
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• W2064305018 doi "https://doi.org/10.1063/1.348393" @default.
• W2064305018 hasPublicationYear "1991" @default.
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