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- W2064600683 abstract "This paper describes a photolithography work cell approach and multiprobe yield results of this cell in a production environment. Important items for design of such lithographic cluster tools are discussed. The cell concept has been proven to accomplish many of the fundamental requirements for cluster processing and has been shown to provide many of the expected advantages. Texas Instrument's experience with this cell concept showed monthly multiprobe yield improvements of 1-10% with an average yield improvement of 4.3%. From a Pareto analysis, it can be seen that the major contribution to the multiprobe yield improvement was a decrease in particulates with under-etch improvements also a major contributor. These improvements were probably due to both resist and develop uniformity improvements." @default.
- W2064600683 created "2016-06-24" @default.
- W2064600683 creator A5007741910 @default.
- W2064600683 creator A5009530643 @default.
- W2064600683 creator A5017280925 @default.
- W2064600683 date "1991-07-01" @default.
- W2064600683 modified "2023-09-23" @default.
- W2064600683 title "<title>Results of photolithographic cluster cells in actual production</title>" @default.
- W2064600683 doi "https://doi.org/10.1117/12.44815" @default.
- W2064600683 hasPublicationYear "1991" @default.
- W2064600683 type Work @default.
- W2064600683 sameAs 2064600683 @default.
- W2064600683 citedByCount "0" @default.
- W2064600683 crossrefType "proceedings-article" @default.
- W2064600683 hasAuthorship W2064600683A5007741910 @default.
- W2064600683 hasAuthorship W2064600683A5009530643 @default.
- W2064600683 hasAuthorship W2064600683A5017280925 @default.
- W2064600683 hasConcept C105487726 @default.
- W2064600683 hasConcept C127413603 @default.
- W2064600683 hasConcept C134121241 @default.
- W2064600683 hasConcept C139719470 @default.
- W2064600683 hasConcept C162324750 @default.
- W2064600683 hasConcept C164866538 @default.
- W2064600683 hasConcept C171250308 @default.
- W2064600683 hasConcept C18762648 @default.
- W2064600683 hasConcept C191897082 @default.
- W2064600683 hasConcept C192562407 @default.
- W2064600683 hasConcept C199360897 @default.
- W2064600683 hasConcept C204223013 @default.
- W2064600683 hasConcept C21880701 @default.
- W2064600683 hasConcept C2778348673 @default.
- W2064600683 hasConcept C41008148 @default.
- W2064600683 hasConcept C49040817 @default.
- W2064600683 hasConcept C78519656 @default.
- W2064600683 hasConceptScore W2064600683C105487726 @default.
- W2064600683 hasConceptScore W2064600683C127413603 @default.
- W2064600683 hasConceptScore W2064600683C134121241 @default.
- W2064600683 hasConceptScore W2064600683C139719470 @default.
- W2064600683 hasConceptScore W2064600683C162324750 @default.
- W2064600683 hasConceptScore W2064600683C164866538 @default.
- W2064600683 hasConceptScore W2064600683C171250308 @default.
- W2064600683 hasConceptScore W2064600683C18762648 @default.
- W2064600683 hasConceptScore W2064600683C191897082 @default.
- W2064600683 hasConceptScore W2064600683C192562407 @default.
- W2064600683 hasConceptScore W2064600683C199360897 @default.
- W2064600683 hasConceptScore W2064600683C204223013 @default.
- W2064600683 hasConceptScore W2064600683C21880701 @default.
- W2064600683 hasConceptScore W2064600683C2778348673 @default.
- W2064600683 hasConceptScore W2064600683C41008148 @default.
- W2064600683 hasConceptScore W2064600683C49040817 @default.
- W2064600683 hasConceptScore W2064600683C78519656 @default.
- W2064600683 hasLocation W20646006831 @default.
- W2064600683 hasOpenAccess W2064600683 @default.
- W2064600683 hasPrimaryLocation W20646006831 @default.
- W2064600683 hasRelatedWork W1414620109 @default.
- W2064600683 hasRelatedWork W1525887404 @default.
- W2064600683 hasRelatedWork W1829980615 @default.
- W2064600683 hasRelatedWork W1859182720 @default.
- W2064600683 hasRelatedWork W1981540084 @default.
- W2064600683 hasRelatedWork W1982463027 @default.
- W2064600683 hasRelatedWork W1997479827 @default.
- W2064600683 hasRelatedWork W2007095371 @default.
- W2064600683 hasRelatedWork W2011436625 @default.
- W2064600683 hasRelatedWork W2025946943 @default.
- W2064600683 hasRelatedWork W2033116678 @default.
- W2064600683 hasRelatedWork W2068607049 @default.
- W2064600683 hasRelatedWork W2072626955 @default.
- W2064600683 hasRelatedWork W2080669441 @default.
- W2064600683 hasRelatedWork W2096622158 @default.
- W2064600683 hasRelatedWork W2101340794 @default.
- W2064600683 hasRelatedWork W2138875902 @default.
- W2064600683 hasRelatedWork W2164584828 @default.
- W2064600683 hasRelatedWork W3010621065 @default.
- W2064600683 hasRelatedWork W3164520799 @default.
- W2064600683 isParatext "false" @default.
- W2064600683 isRetracted "false" @default.
- W2064600683 magId "2064600683" @default.
- W2064600683 workType "article" @default.