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- W2064603453 abstract "A set of analytical equations for the calculation of two-dimensional this diaphragm deflection under pressure is derived. Based on these equations, a design simulation programme capable of calculating the device performance is developed. The simulated results for sensors fabricated on (100) silicon wafer are presented. A new technique to linearize the pressure sensitivity by electrode shaping is also proposed." @default.
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- W2064603453 date "1987-01-01" @default.
- W2064603453 modified "2023-10-03" @default.
- W2064603453 title "CAPSS: A thin diaphragm capacitive pressure sensor simulator" @default.
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- W2064603453 doi "https://doi.org/10.1016/0250-6874(87)85001-1" @default.
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