Matches in SemOpenAlex for { <https://semopenalex.org/work/W2064623481> ?p ?o ?g. }
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- W2064623481 endingPage "85" @default.
- W2064623481 startingPage "81" @default.
- W2064623481 abstract "The onset of microcrystallinity in silicon thin films was realized via an amorphous-to-microcrystalline phase transition. Undoped films have been deposited by the plasma-enhanced chemical vapor deposition (PECVD) technique from silane diluted with hydrogen. Substrate temperature was set as the variable parameter in the deposition. The films were characterized by Raman spectroscopy, Fourier-transform infrared spectroscopy (FTIR) and transmission electron microscopy (TEM). The presence of both amorphous and crystalline phases is indicated in the Raman spectra and the signature of grain boundary regions is not prominent for the transition films. The dominance of monohydride bonding in the amorphous matrix is revealed by FTIR spectra. TEM confirms the presence of small grains (∼50 Å) embedded in the amorphous matrix for the films prepared at the transition region. At the onset of crystallinity, films have a higher order of dark conductivity than a typical amorphous film, but are still photosensitive. Better stability under illumination is observed compared to amorphous silicon." @default.
- W2064623481 created "2016-06-24" @default.
- W2064623481 creator A5059066482 @default.
- W2064623481 creator A5085704830 @default.
- W2064623481 date "2002-02-01" @default.
- W2064623481 modified "2023-09-23" @default.
- W2064623481 title "Onset of microcrystallinity in silicon thin films" @default.
- W2064623481 cites W1967860472 @default.
- W2064623481 cites W1976600949 @default.
- W2064623481 cites W1977288164 @default.
- W2064623481 cites W1982099744 @default.
- W2064623481 cites W2043697951 @default.
- W2064623481 cites W2090682441 @default.
- W2064623481 cites W2091681409 @default.
- W2064623481 cites W2092201725 @default.
- W2064623481 cites W2118039597 @default.
- W2064623481 cites W2145378397 @default.
- W2064623481 cites W2146426027 @default.
- W2064623481 doi "https://doi.org/10.1016/s0040-6090(01)01551-6" @default.
- W2064623481 hasPublicationYear "2002" @default.
- W2064623481 type Work @default.
- W2064623481 sameAs 2064623481 @default.
- W2064623481 citedByCount "17" @default.
- W2064623481 countsByYear W20646234812012 @default.
- W2064623481 countsByYear W20646234812015 @default.
- W2064623481 countsByYear W20646234812020 @default.
- W2064623481 countsByYear W20646234812023 @default.
- W2064623481 crossrefType "journal-article" @default.
- W2064623481 hasAuthorship W2064623481A5059066482 @default.
- W2064623481 hasAuthorship W2064623481A5085704830 @default.
- W2064623481 hasConcept C113196181 @default.
- W2064623481 hasConcept C120665830 @default.
- W2064623481 hasConcept C121332964 @default.
- W2064623481 hasConcept C127413603 @default.
- W2064623481 hasConcept C159985019 @default.
- W2064623481 hasConcept C160892712 @default.
- W2064623481 hasConcept C171250308 @default.
- W2064623481 hasConcept C178790620 @default.
- W2064623481 hasConcept C185592680 @default.
- W2064623481 hasConcept C19067145 @default.
- W2064623481 hasConcept C192562407 @default.
- W2064623481 hasConcept C2776390347 @default.
- W2064623481 hasConcept C2778024649 @default.
- W2064623481 hasConcept C2779667780 @default.
- W2064623481 hasConcept C38347018 @default.
- W2064623481 hasConcept C40003534 @default.
- W2064623481 hasConcept C42360764 @default.
- W2064623481 hasConcept C46275449 @default.
- W2064623481 hasConcept C49040817 @default.
- W2064623481 hasConcept C544956773 @default.
- W2064623481 hasConcept C56052488 @default.
- W2064623481 hasConcept C57410435 @default.
- W2064623481 hasConcept C8010536 @default.
- W2064623481 hasConceptScore W2064623481C113196181 @default.
- W2064623481 hasConceptScore W2064623481C120665830 @default.
- W2064623481 hasConceptScore W2064623481C121332964 @default.
- W2064623481 hasConceptScore W2064623481C127413603 @default.
- W2064623481 hasConceptScore W2064623481C159985019 @default.
- W2064623481 hasConceptScore W2064623481C160892712 @default.
- W2064623481 hasConceptScore W2064623481C171250308 @default.
- W2064623481 hasConceptScore W2064623481C178790620 @default.
- W2064623481 hasConceptScore W2064623481C185592680 @default.
- W2064623481 hasConceptScore W2064623481C19067145 @default.
- W2064623481 hasConceptScore W2064623481C192562407 @default.
- W2064623481 hasConceptScore W2064623481C2776390347 @default.
- W2064623481 hasConceptScore W2064623481C2778024649 @default.
- W2064623481 hasConceptScore W2064623481C2779667780 @default.
- W2064623481 hasConceptScore W2064623481C38347018 @default.
- W2064623481 hasConceptScore W2064623481C40003534 @default.
- W2064623481 hasConceptScore W2064623481C42360764 @default.
- W2064623481 hasConceptScore W2064623481C46275449 @default.
- W2064623481 hasConceptScore W2064623481C49040817 @default.
- W2064623481 hasConceptScore W2064623481C544956773 @default.
- W2064623481 hasConceptScore W2064623481C56052488 @default.
- W2064623481 hasConceptScore W2064623481C57410435 @default.
- W2064623481 hasConceptScore W2064623481C8010536 @default.
- W2064623481 hasLocation W20646234811 @default.
- W2064623481 hasOpenAccess W2064623481 @default.
- W2064623481 hasPrimaryLocation W20646234811 @default.
- W2064623481 hasRelatedWork W1998711683 @default.
- W2064623481 hasRelatedWork W2004961340 @default.
- W2064623481 hasRelatedWork W2016866535 @default.
- W2064623481 hasRelatedWork W2078183599 @default.
- W2064623481 hasRelatedWork W2084947063 @default.
- W2064623481 hasRelatedWork W2087328166 @default.
- W2064623481 hasRelatedWork W2164264681 @default.
- W2064623481 hasRelatedWork W2766374591 @default.
- W2064623481 hasRelatedWork W3139923439 @default.
- W2064623481 hasRelatedWork W820780719 @default.
- W2064623481 hasVolume "403-404" @default.
- W2064623481 isParatext "false" @default.
- W2064623481 isRetracted "false" @default.
- W2064623481 magId "2064623481" @default.
- W2064623481 workType "article" @default.