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- W2064692950 abstract "Lithographic properties of Ag/P4Se10 (80° deposited) films exposed to photons and glow-discharge hydrogen plasma have been investigated. It has been observed that the etching rate of the exposed film is lower compared to the unexposed one, giving rise to a negative tone behavior of the material. The effect of exposure time on the etching rate and selectivity ratio has been studied. The contrast (γ) values obtained for the photoexposed and plasma-exposed negative resists are 2.9 and 5.1, respectively, with a photosensitivity of ∼1021 photons/cm2." @default.
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- W2064692950 date "1987-11-15" @default.
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- W2064692950 title "Plasma-processed Ag/P4Se10 (80° deposited) films as a negative resist" @default.
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- W2064692950 doi "https://doi.org/10.1063/1.339109" @default.
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