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- W2064693665 abstract "Chemically vapor deposited (CVD) is one of the highest purity forms of currently available, so the protective silica scale formed during oxidation in a pure oxygen atmosphere is also of high purity. The oxidation of CVD and CVD coated graphite in 1 atm dry oxygen at 1500°C has been measured and is compared with results from the literature for the growth of high purity silica on CVD and on CVD ." @default.
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- W2064693665 date "1995-01-01" @default.
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- W2064693665 title "The Oxidation of Chemically Vapor Deposited Silicon Nitride and Silicon Nitride Coated Graphite" @default.
- W2064693665 doi "https://doi.org/10.1149/1.2043862" @default.
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