Matches in SemOpenAlex for { <https://semopenalex.org/work/W2064742107> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W2064742107 abstract "We present experimental evidence that iron ions implanted into silicon/silicon dioxide substrates form nanoscale islands during subsequent annealing, which act as catalyst for nanotube chemical vapor deposition (CVD) growth. We have implanted Fe+ ions into thermally grown SiO2 layers on silicon substrates with an energy of 60 keV and a dose of 1015 cm-2. Using this implanted catalyst, we have then grown carbon nanotubes by CVD at 900°C with methane as the precursor gas. We have characterized the catalyst islands and the grown carbon nanotubes by Atomic Force Microscopy (AFM) and Raman spectroscopy. The diameters of carbon nanotubes we have grown from ion implanted catalyst in this work are much smaller than those reported previously. The presence of small diameter nanotubes implies single-walled nanotube (SWNT) growth. The height distribution of the catalyst islands correlates very well with the diameter distribution of nanotubes. This is consistent with previous work which has found evidence that nanotube diameter depends strongly on the size of the catalyst particles. Since ion-implantation can be easily masked by lithography, this technique of nucleating nanotube growth opens up the possibility of controlling the origin of nanotubes at the nanometer scale over high aspect ratio topography. This technique also has the advantage that it can easily be integrated with silicon processing, and scaled to larger substrates." @default.
- W2064742107 created "2016-06-24" @default.
- W2064742107 creator A5055248784 @default.
- W2064742107 creator A5064195900 @default.
- W2064742107 creator A5079062564 @default.
- W2064742107 creator A5083939935 @default.
- W2064742107 date "2005-11-09" @default.
- W2064742107 modified "2023-09-23" @default.
- W2064742107 title "Carbon nanotube growth from ion-implanted catalyst by chemical vapor deposition" @default.
- W2064742107 doi "https://doi.org/10.1117/12.630924" @default.
- W2064742107 hasPublicationYear "2005" @default.
- W2064742107 type Work @default.
- W2064742107 sameAs 2064742107 @default.
- W2064742107 citedByCount "0" @default.
- W2064742107 crossrefType "proceedings-article" @default.
- W2064742107 hasAuthorship W2064742107A5055248784 @default.
- W2064742107 hasAuthorship W2064742107A5064195900 @default.
- W2064742107 hasAuthorship W2064742107A5079062564 @default.
- W2064742107 hasAuthorship W2064742107A5083939935 @default.
- W2064742107 hasConcept C120665830 @default.
- W2064742107 hasConcept C121332964 @default.
- W2064742107 hasConcept C127413603 @default.
- W2064742107 hasConcept C159985019 @default.
- W2064742107 hasConcept C161790260 @default.
- W2064742107 hasConcept C171250308 @default.
- W2064742107 hasConcept C177367955 @default.
- W2064742107 hasConcept C178790620 @default.
- W2064742107 hasConcept C185592680 @default.
- W2064742107 hasConcept C192562407 @default.
- W2064742107 hasConcept C2777619693 @default.
- W2064742107 hasConcept C2777855556 @default.
- W2064742107 hasConcept C2779089622 @default.
- W2064742107 hasConcept C40003534 @default.
- W2064742107 hasConcept C42360764 @default.
- W2064742107 hasConcept C49040817 @default.
- W2064742107 hasConcept C513720949 @default.
- W2064742107 hasConcept C544956773 @default.
- W2064742107 hasConcept C57410435 @default.
- W2064742107 hasConcept C72045907 @default.
- W2064742107 hasConceptScore W2064742107C120665830 @default.
- W2064742107 hasConceptScore W2064742107C121332964 @default.
- W2064742107 hasConceptScore W2064742107C127413603 @default.
- W2064742107 hasConceptScore W2064742107C159985019 @default.
- W2064742107 hasConceptScore W2064742107C161790260 @default.
- W2064742107 hasConceptScore W2064742107C171250308 @default.
- W2064742107 hasConceptScore W2064742107C177367955 @default.
- W2064742107 hasConceptScore W2064742107C178790620 @default.
- W2064742107 hasConceptScore W2064742107C185592680 @default.
- W2064742107 hasConceptScore W2064742107C192562407 @default.
- W2064742107 hasConceptScore W2064742107C2777619693 @default.
- W2064742107 hasConceptScore W2064742107C2777855556 @default.
- W2064742107 hasConceptScore W2064742107C2779089622 @default.
- W2064742107 hasConceptScore W2064742107C40003534 @default.
- W2064742107 hasConceptScore W2064742107C42360764 @default.
- W2064742107 hasConceptScore W2064742107C49040817 @default.
- W2064742107 hasConceptScore W2064742107C513720949 @default.
- W2064742107 hasConceptScore W2064742107C544956773 @default.
- W2064742107 hasConceptScore W2064742107C57410435 @default.
- W2064742107 hasConceptScore W2064742107C72045907 @default.
- W2064742107 hasLocation W20647421071 @default.
- W2064742107 hasOpenAccess W2064742107 @default.
- W2064742107 hasPrimaryLocation W20647421071 @default.
- W2064742107 hasRelatedWork W1985862241 @default.
- W2064742107 hasRelatedWork W2001045656 @default.
- W2064742107 hasRelatedWork W2003679431 @default.
- W2064742107 hasRelatedWork W2037716623 @default.
- W2064742107 hasRelatedWork W2046706580 @default.
- W2064742107 hasRelatedWork W2049012503 @default.
- W2064742107 hasRelatedWork W2143642235 @default.
- W2064742107 hasRelatedWork W2148651986 @default.
- W2064742107 hasRelatedWork W2317708157 @default.
- W2064742107 hasRelatedWork W422388392 @default.
- W2064742107 isParatext "false" @default.
- W2064742107 isRetracted "false" @default.
- W2064742107 magId "2064742107" @default.
- W2064742107 workType "article" @default.