Matches in SemOpenAlex for { <https://semopenalex.org/work/W2064891932> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W2064891932 endingPage "G938" @default.
- W2064891932 startingPage "G938" @default.
- W2064891932 abstract "Oxalic acid is a complexing agent used in both chemical mechanical planarization (CMP) of copper and post-CMP cleaning. Aqueous solubility diagrams and potential–pH diagrams at different total dissolved copper and oxalic acid activities were derived to examine the electrochemistry of copper in aqueous oxalic acid solutions. The predictions of the diagrams are discussed in terms of the experimental data available in the electrochemistry and Cu CMP literature. Good correlations were found." @default.
- W2064891932 created "2016-06-24" @default.
- W2064891932 creator A5002216377 @default.
- W2064891932 date "2005-01-01" @default.
- W2064891932 modified "2023-09-27" @default.
- W2064891932 title "Electrochemistry of Copper in Aqueous Oxalic Acid Solutions" @default.
- W2064891932 cites W1970344653 @default.
- W2064891932 cites W1975316120 @default.
- W2064891932 cites W1978180480 @default.
- W2064891932 cites W1984362384 @default.
- W2064891932 cites W1992370612 @default.
- W2064891932 cites W1992791539 @default.
- W2064891932 cites W1996647398 @default.
- W2064891932 cites W1997316274 @default.
- W2064891932 cites W1999279146 @default.
- W2064891932 cites W2001884868 @default.
- W2064891932 cites W2003659877 @default.
- W2064891932 cites W2006443565 @default.
- W2064891932 cites W2007566948 @default.
- W2064891932 cites W2024016116 @default.
- W2064891932 cites W2026817497 @default.
- W2064891932 cites W2037675092 @default.
- W2064891932 cites W2051310972 @default.
- W2064891932 cites W2054155343 @default.
- W2064891932 cites W2055121853 @default.
- W2064891932 cites W2073433607 @default.
- W2064891932 cites W2078513179 @default.
- W2064891932 cites W2091989934 @default.
- W2064891932 cites W2095605277 @default.
- W2064891932 cites W2120723596 @default.
- W2064891932 cites W2154061477 @default.
- W2064891932 doi "https://doi.org/10.1149/1.2121737" @default.
- W2064891932 hasPublicationYear "2005" @default.
- W2064891932 type Work @default.
- W2064891932 sameAs 2064891932 @default.
- W2064891932 citedByCount "23" @default.
- W2064891932 countsByYear W20648919322012 @default.
- W2064891932 countsByYear W20648919322013 @default.
- W2064891932 countsByYear W20648919322017 @default.
- W2064891932 countsByYear W20648919322018 @default.
- W2064891932 countsByYear W20648919322020 @default.
- W2064891932 countsByYear W20648919322021 @default.
- W2064891932 countsByYear W20648919322022 @default.
- W2064891932 countsByYear W20648919322023 @default.
- W2064891932 crossrefType "journal-article" @default.
- W2064891932 hasAuthorship W2064891932A5002216377 @default.
- W2064891932 hasConcept C147789679 @default.
- W2064891932 hasConcept C155574463 @default.
- W2064891932 hasConcept C17525397 @default.
- W2064891932 hasConcept C178790620 @default.
- W2064891932 hasConcept C179104552 @default.
- W2064891932 hasConcept C180088628 @default.
- W2064891932 hasConcept C184651966 @default.
- W2064891932 hasConcept C185592680 @default.
- W2064891932 hasConcept C192562407 @default.
- W2064891932 hasConcept C2779227376 @default.
- W2064891932 hasConcept C2781346138 @default.
- W2064891932 hasConcept C52859227 @default.
- W2064891932 hasConcept C544778455 @default.
- W2064891932 hasConceptScore W2064891932C147789679 @default.
- W2064891932 hasConceptScore W2064891932C155574463 @default.
- W2064891932 hasConceptScore W2064891932C17525397 @default.
- W2064891932 hasConceptScore W2064891932C178790620 @default.
- W2064891932 hasConceptScore W2064891932C179104552 @default.
- W2064891932 hasConceptScore W2064891932C180088628 @default.
- W2064891932 hasConceptScore W2064891932C184651966 @default.
- W2064891932 hasConceptScore W2064891932C185592680 @default.
- W2064891932 hasConceptScore W2064891932C192562407 @default.
- W2064891932 hasConceptScore W2064891932C2779227376 @default.
- W2064891932 hasConceptScore W2064891932C2781346138 @default.
- W2064891932 hasConceptScore W2064891932C52859227 @default.
- W2064891932 hasConceptScore W2064891932C544778455 @default.
- W2064891932 hasIssue "12" @default.
- W2064891932 hasLocation W20648919321 @default.
- W2064891932 hasOpenAccess W2064891932 @default.
- W2064891932 hasPrimaryLocation W20648919321 @default.
- W2064891932 hasRelatedWork W1974161544 @default.
- W2064891932 hasRelatedWork W2019068059 @default.
- W2064891932 hasRelatedWork W2055285704 @default.
- W2064891932 hasRelatedWork W2056168756 @default.
- W2064891932 hasRelatedWork W2064891932 @default.
- W2064891932 hasRelatedWork W2115897973 @default.
- W2064891932 hasRelatedWork W2517563256 @default.
- W2064891932 hasRelatedWork W2901441640 @default.
- W2064891932 hasRelatedWork W3011291179 @default.
- W2064891932 hasRelatedWork W4280574477 @default.
- W2064891932 hasVolume "152" @default.
- W2064891932 isParatext "false" @default.
- W2064891932 isRetracted "false" @default.
- W2064891932 magId "2064891932" @default.
- W2064891932 workType "article" @default.