Matches in SemOpenAlex for { <https://semopenalex.org/work/W2065107953> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2065107953 abstract "X-ray porosimetry is used to characterize the porosity, the average film density, and the density of the wall material between the pores in ultralow-k films as a function of film thickness. These measurements are performed on films that have been plasma treated as well as plasma etched and an ashed to evaluate how these integration processes affect the pore characteristics of the interlayer dielectric. The damage, a decrease of porosity and an increase in the wall density, is strongly localized to the exposed surface of the film. The plasma etching and ashing tend to induce more surface damage than the plasma alone." @default.
- W2065107953 created "2016-06-24" @default.
- W2065107953 creator A5019204581 @default.
- W2065107953 creator A5042591344 @default.
- W2065107953 creator A5057373192 @default.
- W2065107953 creator A5066850474 @default.
- W2065107953 creator A5079225210 @default.
- W2065107953 date "2007-10-22" @default.
- W2065107953 modified "2023-10-16" @default.
- W2065107953 title "Nonuniform structural degradation in porous organosilicate films exposed to plasma, etching, and ashing as characterized by x-ray porosimetry" @default.
- W2065107953 cites W2005842569 @default.
- W2065107953 cites W2013779441 @default.
- W2065107953 cites W2019397189 @default.
- W2065107953 cites W2044769302 @default.
- W2065107953 cites W2046269246 @default.
- W2065107953 cites W2053117344 @default.
- W2065107953 cites W2062506665 @default.
- W2065107953 cites W2065372341 @default.
- W2065107953 cites W2084460801 @default.
- W2065107953 cites W2086529087 @default.
- W2065107953 doi "https://doi.org/10.1063/1.2800376" @default.
- W2065107953 hasPublicationYear "2007" @default.
- W2065107953 type Work @default.
- W2065107953 sameAs 2065107953 @default.
- W2065107953 citedByCount "11" @default.
- W2065107953 countsByYear W20651079532012 @default.
- W2065107953 countsByYear W20651079532013 @default.
- W2065107953 countsByYear W20651079532019 @default.
- W2065107953 countsByYear W20651079532021 @default.
- W2065107953 crossrefType "journal-article" @default.
- W2065107953 hasAuthorship W2065107953A5019204581 @default.
- W2065107953 hasAuthorship W2065107953A5042591344 @default.
- W2065107953 hasAuthorship W2065107953A5057373192 @default.
- W2065107953 hasAuthorship W2065107953A5066850474 @default.
- W2065107953 hasAuthorship W2065107953A5079225210 @default.
- W2065107953 hasConcept C100460472 @default.
- W2065107953 hasConcept C105569014 @default.
- W2065107953 hasConcept C107187091 @default.
- W2065107953 hasConcept C107872376 @default.
- W2065107953 hasConcept C113196181 @default.
- W2065107953 hasConcept C114873805 @default.
- W2065107953 hasConcept C121332964 @default.
- W2065107953 hasConcept C133386390 @default.
- W2065107953 hasConcept C159985019 @default.
- W2065107953 hasConcept C185592680 @default.
- W2065107953 hasConcept C192562407 @default.
- W2065107953 hasConcept C2779227376 @default.
- W2065107953 hasConcept C49040817 @default.
- W2065107953 hasConcept C62520636 @default.
- W2065107953 hasConcept C6648577 @default.
- W2065107953 hasConcept C82706917 @default.
- W2065107953 hasConcept C99293441 @default.
- W2065107953 hasConceptScore W2065107953C100460472 @default.
- W2065107953 hasConceptScore W2065107953C105569014 @default.
- W2065107953 hasConceptScore W2065107953C107187091 @default.
- W2065107953 hasConceptScore W2065107953C107872376 @default.
- W2065107953 hasConceptScore W2065107953C113196181 @default.
- W2065107953 hasConceptScore W2065107953C114873805 @default.
- W2065107953 hasConceptScore W2065107953C121332964 @default.
- W2065107953 hasConceptScore W2065107953C133386390 @default.
- W2065107953 hasConceptScore W2065107953C159985019 @default.
- W2065107953 hasConceptScore W2065107953C185592680 @default.
- W2065107953 hasConceptScore W2065107953C192562407 @default.
- W2065107953 hasConceptScore W2065107953C2779227376 @default.
- W2065107953 hasConceptScore W2065107953C49040817 @default.
- W2065107953 hasConceptScore W2065107953C62520636 @default.
- W2065107953 hasConceptScore W2065107953C6648577 @default.
- W2065107953 hasConceptScore W2065107953C82706917 @default.
- W2065107953 hasConceptScore W2065107953C99293441 @default.
- W2065107953 hasIssue "17" @default.
- W2065107953 hasLocation W20651079531 @default.
- W2065107953 hasOpenAccess W2065107953 @default.
- W2065107953 hasPrimaryLocation W20651079531 @default.
- W2065107953 hasRelatedWork W1952728511 @default.
- W2065107953 hasRelatedWork W1994753809 @default.
- W2065107953 hasRelatedWork W2043673973 @default.
- W2065107953 hasRelatedWork W2059760261 @default.
- W2065107953 hasRelatedWork W2065107953 @default.
- W2065107953 hasRelatedWork W2155099757 @default.
- W2065107953 hasRelatedWork W2173090879 @default.
- W2065107953 hasRelatedWork W2366161362 @default.
- W2065107953 hasRelatedWork W3197419717 @default.
- W2065107953 hasRelatedWork W2471174329 @default.
- W2065107953 hasVolume "91" @default.
- W2065107953 isParatext "false" @default.
- W2065107953 isRetracted "false" @default.
- W2065107953 magId "2065107953" @default.
- W2065107953 workType "article" @default.