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- W2065126367 abstract "Abstract Highly-insulating silicon oxide which contained hydrocarbon (CHn) groups (SiOCH) was deposited at room temperature by plasma-enhanced chemical vapor deposition using tetraethoxysilane. The carbon-rich SiOCH film deposited at 50W, 27 °C showed the high resistivity of 6 × 1015Ω cm at 0.5MV/cm. The insulating properties strongly depended on the deposition temperature and radio frequency (RF) power. The SiOCH films deposited at 300W, 53 °C showed the low carbon content and low resistivity due to the incorporation of hydroxyl (OH) groups generating electron traps. The room-temperature deposition at low RF power enabled the high-CHn addition, resulting in the suppression of OH incorporation into the films. The highly-insulating properties of the room-temperature deposited SiOCH originated from the suppression of OH incorporation." @default.
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- W2065126367 date "2008-11-01" @default.
- W2065126367 modified "2023-09-26" @default.
- W2065126367 title "Room-temperature deposition of highly-insulating SiOCH films by plasma-enhanced chemical vapor deposition using tetraethoxysilane" @default.
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- W2065126367 doi "https://doi.org/10.1016/j.tsf.2008.06.049" @default.
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