Matches in SemOpenAlex for { <https://semopenalex.org/work/W2065187136> ?p ?o ?g. }
- W2065187136 endingPage "3608" @default.
- W2065187136 startingPage "3595" @default.
- W2065187136 abstract "Redistribution of hydrogen caused by hot‐electron injection has been studied by hydrogen depth profiling with 15N nuclear reaction analysis and electrical methods. Internal photoemission and Fowler–Nordheim injection were used for electron injection into large Al‐gate and polysilicon‐gate capacitors, respectively. A hydrogen‐rich layer (∼1015 atoms/cm2) observed at the Al/SiO2 interface was found to serve as the source of hydrogen during the hot‐electron stress. A small fraction of the hydrogen released from this layer was found to be retrapped near the Si/SiO2 interface for large electron fluences in the Al‐gate samples. Within the limit of detectability, ∼1014 cm−2, no hydrogen was measured using nuclear reaction analysis in the polysilicon‐gate samples. The buildup of hydrogen at the Si/SiO2 interface exhibits a threshold at ∼1 MV/cm, consistent with the threshold for electron heating in SiO2. In the ‘‘wet’’ SiO2 films with purposely introduced excess hydrogen, the rate of hydrogen buildup at the Si/Si..." @default.
- W2065187136 created "2016-06-24" @default.
- W2065187136 creator A5010678092 @default.
- W2065187136 creator A5023414264 @default.
- W2065187136 creator A5028598180 @default.
- W2065187136 creator A5037096501 @default.
- W2065187136 date "1994-09-15" @default.
- W2065187136 modified "2023-10-14" @default.
- W2065187136 title "Hot‐electron‐induced hydrogen redistribution and defect generation in metal‐oxide‐semiconductor capacitors" @default.
- W2065187136 cites W1963561046 @default.
- W2065187136 cites W1964545171 @default.
- W2065187136 cites W1965516542 @default.
- W2065187136 cites W1966527216 @default.
- W2065187136 cites W1966938053 @default.
- W2065187136 cites W1970029119 @default.
- W2065187136 cites W1975277570 @default.
- W2065187136 cites W1976304097 @default.
- W2065187136 cites W1977598035 @default.
- W2065187136 cites W1979945568 @default.
- W2065187136 cites W1986207778 @default.
- W2065187136 cites W1988250029 @default.
- W2065187136 cites W1993396459 @default.
- W2065187136 cites W1996567850 @default.
- W2065187136 cites W1996803158 @default.
- W2065187136 cites W1997818163 @default.
- W2065187136 cites W2002985656 @default.
- W2065187136 cites W2006534391 @default.
- W2065187136 cites W2009841060 @default.
- W2065187136 cites W2012462268 @default.
- W2065187136 cites W2021750186 @default.
- W2065187136 cites W2022981129 @default.
- W2065187136 cites W2023259158 @default.
- W2065187136 cites W2024686993 @default.
- W2065187136 cites W2026211033 @default.
- W2065187136 cites W2029707735 @default.
- W2065187136 cites W2030298812 @default.
- W2065187136 cites W2031451918 @default.
- W2065187136 cites W2031969444 @default.
- W2065187136 cites W2032658118 @default.
- W2065187136 cites W2038639355 @default.
- W2065187136 cites W2049410274 @default.
- W2065187136 cites W2053663438 @default.
- W2065187136 cites W2059047269 @default.
- W2065187136 cites W2059219798 @default.
- W2065187136 cites W2064072391 @default.
- W2065187136 cites W2066973301 @default.
- W2065187136 cites W2068172948 @default.
- W2065187136 cites W2069124125 @default.
- W2065187136 cites W2072751620 @default.
- W2065187136 cites W2081048183 @default.
- W2065187136 cites W2083671486 @default.
- W2065187136 cites W2084568249 @default.
- W2065187136 cites W2085978947 @default.
- W2065187136 cites W2090000816 @default.
- W2065187136 cites W2096544402 @default.
- W2065187136 cites W2109935085 @default.
- W2065187136 cites W2124810356 @default.
- W2065187136 cites W2138034436 @default.
- W2065187136 doi "https://doi.org/10.1063/1.357420" @default.
- W2065187136 hasPublicationYear "1994" @default.
- W2065187136 type Work @default.
- W2065187136 sameAs 2065187136 @default.
- W2065187136 citedByCount "83" @default.
- W2065187136 countsByYear W20651871362012 @default.
- W2065187136 countsByYear W20651871362013 @default.
- W2065187136 countsByYear W20651871362014 @default.
- W2065187136 countsByYear W20651871362015 @default.
- W2065187136 countsByYear W20651871362017 @default.
- W2065187136 countsByYear W20651871362018 @default.
- W2065187136 countsByYear W20651871362019 @default.
- W2065187136 countsByYear W20651871362021 @default.
- W2065187136 countsByYear W20651871362022 @default.
- W2065187136 countsByYear W20651871362023 @default.
- W2065187136 crossrefType "journal-article" @default.
- W2065187136 hasAuthorship W2065187136A5010678092 @default.
- W2065187136 hasAuthorship W2065187136A5023414264 @default.
- W2065187136 hasAuthorship W2065187136A5028598180 @default.
- W2065187136 hasAuthorship W2065187136A5037096501 @default.
- W2065187136 hasConcept C108225325 @default.
- W2065187136 hasConcept C119599485 @default.
- W2065187136 hasConcept C121332964 @default.
- W2065187136 hasConcept C127413603 @default.
- W2065187136 hasConcept C147120987 @default.
- W2065187136 hasConcept C165801399 @default.
- W2065187136 hasConcept C17744445 @default.
- W2065187136 hasConcept C178790620 @default.
- W2065187136 hasConcept C185544564 @default.
- W2065187136 hasConcept C185592680 @default.
- W2065187136 hasConcept C189278905 @default.
- W2065187136 hasConcept C191897082 @default.
- W2065187136 hasConcept C192562407 @default.
- W2065187136 hasConcept C199539241 @default.
- W2065187136 hasConcept C2779851234 @default.
- W2065187136 hasConcept C49040817 @default.
- W2065187136 hasConcept C512968161 @default.
- W2065187136 hasConcept C52192207 @default.
- W2065187136 hasConcept C544153396 @default.
- W2065187136 hasConcept C74080474 @default.