Matches in SemOpenAlex for { <https://semopenalex.org/work/W2065266227> ?p ?o ?g. }
Showing items 1 to 73 of
73
with 100 items per page.
- W2065266227 endingPage "292" @default.
- W2065266227 startingPage "287" @default.
- W2065266227 abstract "In structure studies performed using the Grazing Incident X-ray Diffraction Geometry (GIXD) for different incident angles it was indicated that the Si-N layers are non-homogenous and their structure depends on the penetration depth. The layers close to substrate (α = 2, 1°) show the presence of the Si3N4, SiO2, SiO2, SiC phases and an amorphous Si-N phase as well. The layers near the surface (α = 0.5; 0.25; 0.15°) are poorer in Si-N phases. There are only observed the presence of the Si3N4 and SiO2 phases. The obtained results confirm the non-homogenity of layers." @default.
- W2065266227 created "2016-06-24" @default.
- W2065266227 creator A5060991004 @default.
- W2065266227 creator A5091608277 @default.
- W2065266227 date "2007-12-01" @default.
- W2065266227 modified "2023-10-06" @default.
- W2065266227 title "The Structure Studies on Si-N Thin Layers" @default.
- W2065266227 cites W1979239356 @default.
- W2065266227 cites W2065448933 @default.
- W2065266227 cites W2084064945 @default.
- W2065266227 cites W2085138854 @default.
- W2065266227 cites W2092968454 @default.
- W2065266227 doi "https://doi.org/10.4028/www.scientific.net/ssp.130.287" @default.
- W2065266227 hasPublicationYear "2007" @default.
- W2065266227 type Work @default.
- W2065266227 sameAs 2065266227 @default.
- W2065266227 citedByCount "2" @default.
- W2065266227 countsByYear W20652662272014 @default.
- W2065266227 crossrefType "journal-article" @default.
- W2065266227 hasAuthorship W2065266227A5060991004 @default.
- W2065266227 hasAuthorship W2065266227A5091608277 @default.
- W2065266227 hasConcept C111368507 @default.
- W2065266227 hasConcept C120665830 @default.
- W2065266227 hasConcept C121332964 @default.
- W2065266227 hasConcept C127313418 @default.
- W2065266227 hasConcept C127413603 @default.
- W2065266227 hasConcept C178790620 @default.
- W2065266227 hasConcept C185592680 @default.
- W2065266227 hasConcept C192562407 @default.
- W2065266227 hasConcept C193493375 @default.
- W2065266227 hasConcept C207114421 @default.
- W2065266227 hasConcept C2777289219 @default.
- W2065266227 hasConcept C42475967 @default.
- W2065266227 hasConcept C44280652 @default.
- W2065266227 hasConcept C56052488 @default.
- W2065266227 hasConcept C8010536 @default.
- W2065266227 hasConcept C80107235 @default.
- W2065266227 hasConceptScore W2065266227C111368507 @default.
- W2065266227 hasConceptScore W2065266227C120665830 @default.
- W2065266227 hasConceptScore W2065266227C121332964 @default.
- W2065266227 hasConceptScore W2065266227C127313418 @default.
- W2065266227 hasConceptScore W2065266227C127413603 @default.
- W2065266227 hasConceptScore W2065266227C178790620 @default.
- W2065266227 hasConceptScore W2065266227C185592680 @default.
- W2065266227 hasConceptScore W2065266227C192562407 @default.
- W2065266227 hasConceptScore W2065266227C193493375 @default.
- W2065266227 hasConceptScore W2065266227C207114421 @default.
- W2065266227 hasConceptScore W2065266227C2777289219 @default.
- W2065266227 hasConceptScore W2065266227C42475967 @default.
- W2065266227 hasConceptScore W2065266227C44280652 @default.
- W2065266227 hasConceptScore W2065266227C56052488 @default.
- W2065266227 hasConceptScore W2065266227C8010536 @default.
- W2065266227 hasConceptScore W2065266227C80107235 @default.
- W2065266227 hasLocation W20652662271 @default.
- W2065266227 hasOpenAccess W2065266227 @default.
- W2065266227 hasPrimaryLocation W20652662271 @default.
- W2065266227 hasRelatedWork W1930805725 @default.
- W2065266227 hasRelatedWork W1963968154 @default.
- W2065266227 hasRelatedWork W1965244782 @default.
- W2065266227 hasRelatedWork W1970688204 @default.
- W2065266227 hasRelatedWork W1974809689 @default.
- W2065266227 hasRelatedWork W1983022526 @default.
- W2065266227 hasRelatedWork W1999767308 @default.
- W2065266227 hasRelatedWork W2006195912 @default.
- W2065266227 hasRelatedWork W2018072150 @default.
- W2065266227 hasRelatedWork W2053816239 @default.
- W2065266227 hasVolume "130" @default.
- W2065266227 isParatext "false" @default.
- W2065266227 isRetracted "false" @default.
- W2065266227 magId "2065266227" @default.
- W2065266227 workType "article" @default.