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• W2065278325 endingPage "40" @default.
• W2065278325 startingPage "34" @default.
• W2065278325 abstract "Ni silicides used as contacts in source/drain and gate of advanced CMOS devices were analyzed by atom probe tomography (APT) at atomic scale. These measurements were performed on 45 nm nMOS after standard self-aligned silicide (salicide) process using Ni(5 at.% Pt) alloy. After the first annealing (RTA1), δ-Ni2Si was the only phase formed on gate and source/drain while, after the second annealing (RTA2), two different Ni silicides have been formed: NiSi on the gate and δ-Ni2Si on the source and drain. This difference between source/drain and gate regions in nMOS devices has been related to the Si substrate nature (poly or mono-crystalline) and to the size of the contact. In fact, NiSi seems to have difficulties to nucleate in the narrow source/drain contact on mono-crystalline Si. The results have been compared to analysis performed on 28 nm nMOS where the Pt concentration is higher (10 at.% Pt). In this case, θ-Ni2Si is the first phase to form after RTA1 and NiSi is then formed at the same time on source (or drain) and gate after RTA2. The absence of the formation of NiSi from δ-Ni2Si/Si(1 0 0) interface compared to θ-Ni2Si/Si(1 0 0) interface could be related to the difference of the interface energies. The redistributions of As and Pt in different silicides and interfaces were measured and discussed. In particular, it has been evidenced that Pt redistributions obtained on both 45 and 28 nm MOS transistors correspond to respective Pt distributions measured on blanket wafers." @default.
• W2065278325 created "2016-06-24" @default.
• W2065278325 creator A5000082795 @default.
• W2065278325 creator A5008206182 @default.
• W2065278325 creator A5024940340 @default.
• W2065278325 creator A5034108347 @default.
• W2065278325 creator A5056317946 @default.
• W2065278325 creator A5056844246 @default.
• W2065278325 creator A5056861244 @default.
• W2065278325 creator A5064544898 @default.
• W2065278325 creator A5082212090 @default.
• W2065278325 date "2014-05-01" @default.
• W2065278325 modified "2023-10-10" @default.
• W2065278325 title "Ni(Pt)-silicide contacts on CMOS devices: Impact of substrate nature and Pt concentration on the phase formation" @default.
• W2065278325 cites W1973466422 @default.
• W2065278325 cites W1976690520 @default.
• W2065278325 cites W1977338420 @default.
• W2065278325 cites W1983686945 @default.
• W2065278325 cites W1999804748 @default.
• W2065278325 cites W2012506275 @default.
• W2065278325 cites W2019855812 @default.
• W2065278325 cites W2019942105 @default.
• W2065278325 cites W2020447401 @default.
• W2065278325 cites W2025679171 @default.
• W2065278325 cites W2037478810 @default.
• W2065278325 cites W2061708479 @default.
• W2065278325 cites W2076048220 @default.
• W2065278325 cites W2076310820 @default.
• W2065278325 cites W2076358032 @default.
• W2065278325 cites W2076993068 @default.
• W2065278325 cites W2087267315 @default.
• W2065278325 cites W2111075646 @default.
• W2065278325 doi "https://doi.org/10.1016/j.mee.2013.12.016" @default.
• W2065278325 hasPublicationYear "2014" @default.
• W2065278325 type Work @default.
• W2065278325 sameAs 2065278325 @default.
• W2065278325 citedByCount "9" @default.
• W2065278325 countsByYear W20652783252014 @default.
• W2065278325 countsByYear W20652783252015 @default.
• W2065278325 countsByYear W20652783252020 @default.
• W2065278325 countsByYear W20652783252021 @default.
• W2065278325 countsByYear W20652783252022 @default.
• W2065278325 countsByYear W20652783252023 @default.
• W2065278325 crossrefType "journal-article" @default.
• W2065278325 hasAuthorship W2065278325A5000082795 @default.
• W2065278325 hasAuthorship W2065278325A5008206182 @default.
• W2065278325 hasAuthorship W2065278325A5024940340 @default.
• W2065278325 hasAuthorship W2065278325A5034108347 @default.
• W2065278325 hasAuthorship W2065278325A5056317946 @default.
• W2065278325 hasAuthorship W2065278325A5056844246 @default.
• W2065278325 hasAuthorship W2065278325A5056861244 @default.
• W2065278325 hasAuthorship W2065278325A5064544898 @default.
• W2065278325 hasAuthorship W2065278325A5082212090 @default.
• W2065278325 hasConcept C111368507 @default.
• W2065278325 hasConcept C113196181 @default.
• W2065278325 hasConcept C119599485 @default.
• W2065278325 hasConcept C127313418 @default.
• W2065278325 hasConcept C127413603 @default.
• W2065278325 hasConcept C165801399 @default.
• W2065278325 hasConcept C16876290 @default.
• W2065278325 hasConcept C171250308 @default.
• W2065278325 hasConcept C172385210 @default.
• W2065278325 hasConcept C173118649 @default.
• W2065278325 hasConcept C178790620 @default.
• W2065278325 hasConcept C185592680 @default.
• W2065278325 hasConcept C191897082 @default.
• W2065278325 hasConcept C192562407 @default.
• W2065278325 hasConcept C197162436 @default.
• W2065278325 hasConcept C2777289219 @default.
• W2065278325 hasConcept C2777855556 @default.
• W2065278325 hasConcept C2780026712 @default.
• W2065278325 hasConcept C2780901251 @default.
• W2065278325 hasConcept C43617362 @default.
• W2065278325 hasConcept C46362747 @default.
• W2065278325 hasConcept C49040817 @default.
• W2065278325 hasConcept C544956773 @default.
• W2065278325 hasConcept C61048295 @default.
• W2065278325 hasConceptScore W2065278325C111368507 @default.
• W2065278325 hasConceptScore W2065278325C113196181 @default.
• W2065278325 hasConceptScore W2065278325C119599485 @default.
• W2065278325 hasConceptScore W2065278325C127313418 @default.
• W2065278325 hasConceptScore W2065278325C127413603 @default.
• W2065278325 hasConceptScore W2065278325C165801399 @default.
• W2065278325 hasConceptScore W2065278325C16876290 @default.
• W2065278325 hasConceptScore W2065278325C171250308 @default.
• W2065278325 hasConceptScore W2065278325C172385210 @default.
• W2065278325 hasConceptScore W2065278325C173118649 @default.
• W2065278325 hasConceptScore W2065278325C178790620 @default.
• W2065278325 hasConceptScore W2065278325C185592680 @default.
• W2065278325 hasConceptScore W2065278325C191897082 @default.
• W2065278325 hasConceptScore W2065278325C192562407 @default.
• W2065278325 hasConceptScore W2065278325C197162436 @default.
• W2065278325 hasConceptScore W2065278325C2777289219 @default.
• W2065278325 hasConceptScore W2065278325C2777855556 @default.
• W2065278325 hasConceptScore W2065278325C2780026712 @default.
• W2065278325 hasConceptScore W2065278325C2780901251 @default.
• W2065278325 hasConceptScore W2065278325C43617362 @default.
• W2065278325 hasConceptScore W2065278325C46362747 @default.

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