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- W2065384292 abstract "We describe here an extensive study of the relation between polymer structure and rates of NMP uptake for a set of polymer films with a very broad range of properties. NMP labeled using radioactive <SUP>14</SUP>C was introduced at a concentration of 12 ppb into a stream of purified air. The film of interest was then immersed in the airstream for a predetermined time under controlled conditions. The radionuclide serves as a tag which allows precise quantitation of NMP absorbed by the polymer film. NMP uptake rates measured using this method are shown to correlate with polymer physical properties in a straightforward manner. The observed trends are in accord with those expected on the basis of the solution diffusion model of polymer permeation. These data provide a basis for the rational design of polymers for chemically amplified resists which are insensitive to airborne contaminants." @default.
- W2065384292 created "2016-06-24" @default.
- W2065384292 creator A5009564795 @default.
- W2065384292 creator A5028257239 @default.
- W2065384292 creator A5042982993 @default.
- W2065384292 creator A5055963655 @default.
- W2065384292 creator A5068818684 @default.
- W2065384292 date "1993-09-15" @default.
- W2065384292 modified "2023-10-16" @default.
- W2065384292 title "<title>Influence of polymer properties on airborne chemical contamination of chemically amplified resists</title>" @default.
- W2065384292 doi "https://doi.org/10.1117/12.154774" @default.
- W2065384292 hasPublicationYear "1993" @default.
- W2065384292 type Work @default.
- W2065384292 sameAs 2065384292 @default.
- W2065384292 citedByCount "12" @default.
- W2065384292 countsByYear W20653842922013 @default.
- W2065384292 crossrefType "proceedings-article" @default.
- W2065384292 hasAuthorship W2065384292A5009564795 @default.
- W2065384292 hasAuthorship W2065384292A5028257239 @default.
- W2065384292 hasAuthorship W2065384292A5042982993 @default.
- W2065384292 hasAuthorship W2065384292A5055963655 @default.
- W2065384292 hasAuthorship W2065384292A5068818684 @default.
- W2065384292 hasConcept C112570922 @default.
- W2065384292 hasConcept C121332964 @default.
- W2065384292 hasConcept C127413603 @default.
- W2065384292 hasConcept C159985019 @default.
- W2065384292 hasConcept C171250308 @default.
- W2065384292 hasConcept C185592680 @default.
- W2065384292 hasConcept C18903297 @default.
- W2065384292 hasConcept C192562407 @default.
- W2065384292 hasConcept C2779227376 @default.
- W2065384292 hasConcept C41625074 @default.
- W2065384292 hasConcept C42360764 @default.
- W2065384292 hasConcept C50670333 @default.
- W2065384292 hasConcept C521977710 @default.
- W2065384292 hasConcept C53524968 @default.
- W2065384292 hasConcept C55493867 @default.
- W2065384292 hasConcept C69357855 @default.
- W2065384292 hasConcept C86803240 @default.
- W2065384292 hasConcept C97355855 @default.
- W2065384292 hasConceptScore W2065384292C112570922 @default.
- W2065384292 hasConceptScore W2065384292C121332964 @default.
- W2065384292 hasConceptScore W2065384292C127413603 @default.
- W2065384292 hasConceptScore W2065384292C159985019 @default.
- W2065384292 hasConceptScore W2065384292C171250308 @default.
- W2065384292 hasConceptScore W2065384292C185592680 @default.
- W2065384292 hasConceptScore W2065384292C18903297 @default.
- W2065384292 hasConceptScore W2065384292C192562407 @default.
- W2065384292 hasConceptScore W2065384292C2779227376 @default.
- W2065384292 hasConceptScore W2065384292C41625074 @default.
- W2065384292 hasConceptScore W2065384292C42360764 @default.
- W2065384292 hasConceptScore W2065384292C50670333 @default.
- W2065384292 hasConceptScore W2065384292C521977710 @default.
- W2065384292 hasConceptScore W2065384292C53524968 @default.
- W2065384292 hasConceptScore W2065384292C55493867 @default.
- W2065384292 hasConceptScore W2065384292C69357855 @default.
- W2065384292 hasConceptScore W2065384292C86803240 @default.
- W2065384292 hasConceptScore W2065384292C97355855 @default.
- W2065384292 hasLocation W20653842921 @default.
- W2065384292 hasOpenAccess W2065384292 @default.
- W2065384292 hasPrimaryLocation W20653842921 @default.
- W2065384292 hasRelatedWork W1974253895 @default.
- W2065384292 hasRelatedWork W2022466623 @default.
- W2065384292 hasRelatedWork W2049953843 @default.
- W2065384292 hasRelatedWork W2054796528 @default.
- W2065384292 hasRelatedWork W2074528267 @default.
- W2065384292 hasRelatedWork W2081152130 @default.
- W2065384292 hasRelatedWork W2088715418 @default.
- W2065384292 hasRelatedWork W2097868149 @default.
- W2065384292 hasRelatedWork W2647262206 @default.
- W2065384292 hasRelatedWork W4386552230 @default.
- W2065384292 isParatext "false" @default.
- W2065384292 isRetracted "false" @default.
- W2065384292 magId "2065384292" @default.
- W2065384292 workType "article" @default.