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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2065394006> ?p ?o ?g. }

• W2065394006 endingPage "575" @default.
• W2065394006 startingPage "569" @default.
• W2065394006 abstract "The effects of preamorphization and rapid thermal annealing (RTA) on the formation of shallow arsenic junctions have been investigated. Single-crystal silicon substrates were preamorphized with a Si+ implant (3.0×1015 ions/cm2 at 60 keV) followed by an As+ implant (1.0×1015 to 1.0×1016 ions/cm2 at 50 keV) through a 200-Å oxide cap. As+implantation into single-crystal silicon was also investigated. RTA and reference furnace anneals were carried out to recrystallize the amorphous layers into single crystals and to activate the arsenic implants. Experimental results have been obtained for amorphous layer characteristics, residual damage, dopant profiles, junction depth, sheet resistance, and carrier concentration. Measurements were made by spreading resistance probe (SRP) and secondary ion mass spectrometry (SIMS) profiling, Rutherford backscattering spectrometry (RBS), and transmission electron microscopy (TEM); a limited amount of junction leakage data was also obtained. Arsenic depth profiles as measured by SIMS, RBS, and SRP are compared. The agreement between the three profiling techniques is fair to good. RTA resulted in junctions with crystal quality and dopant activation similar to those of furnace annealed junctions with less impurity profile broadening. Preamorphization did not result in a significant reduction in the junction depth and inhibited complete removal of extended defects. Two criteria for an acceptable anneal were considered; damage removal was not considered to be as significant as leakage current reduction. An optimum RTA cycle was determined to be 1050 °C for 20 s." @default.
• W2065394006 created "2016-06-24" @default.
• W2065394006 creator A5035026792 @default.
• W2065394006 creator A5039182364 @default.
• W2065394006 date "1987-07-15" @default.
• W2065394006 modified "2023-10-18" @default.
• W2065394006 title "Formation of shallow<i>n</i>⁺<i>p</i>junctions" @default.
• W2065394006 cites W1966430536 @default.
• W2065394006 cites W1983121707 @default.
• W2065394006 cites W2023452279 @default.
• W2065394006 cites W2025241552 @default.
• W2065394006 cites W2052477017 @default.
• W2065394006 cites W2052511023 @default.
• W2065394006 cites W2056712431 @default.
• W2065394006 cites W2089164295 @default.
• W2065394006 cites W2118483692 @default.
• W2065394006 cites W2134270922 @default.
• W2065394006 cites W2139736747 @default.
• W2065394006 cites W2313558126 @default.
• W2065394006 doi "https://doi.org/10.1063/1.339784" @default.
• W2065394006 hasPublicationYear "1987" @default.
• W2065394006 type Work @default.
• W2065394006 sameAs 2065394006 @default.
• W2065394006 citedByCount "9" @default.
• W2065394006 crossrefType "journal-article" @default.
• W2065394006 hasAuthorship W2065394006A5035026792 @default.
• W2065394006 hasAuthorship W2065394006A5039182364 @default.
• W2065394006 hasConcept C113196181 @default.
• W2065394006 hasConcept C145148216 @default.
• W2065394006 hasConcept C146088050 @default.
• W2065394006 hasConcept C171250308 @default.
• W2065394006 hasConcept C178790620 @default.
• W2065394006 hasConcept C185592680 @default.
• W2065394006 hasConcept C19067145 @default.
• W2065394006 hasConcept C191897082 @default.
• W2065394006 hasConcept C191952053 @default.
• W2065394006 hasConcept C192562407 @default.
• W2065394006 hasConcept C207521374 @default.
• W2065394006 hasConcept C2777855556 @default.
• W2065394006 hasConcept C2779227376 @default.
• W2065394006 hasConcept C2780081452 @default.
• W2065394006 hasConcept C2780547777 @default.
• W2065394006 hasConcept C41823505 @default.
• W2065394006 hasConcept C43617362 @default.
• W2065394006 hasConcept C49040817 @default.
• W2065394006 hasConcept C502230775 @default.
• W2065394006 hasConcept C544956773 @default.
• W2065394006 hasConcept C56052488 @default.
• W2065394006 hasConcept C57863236 @default.
• W2065394006 hasConcept C66825105 @default.
• W2065394006 hasConcept C71987851 @default.
• W2065394006 hasConcept C77671233 @default.
• W2065394006 hasConcept C8010536 @default.
• W2065394006 hasConceptScore W2065394006C113196181 @default.
• W2065394006 hasConceptScore W2065394006C145148216 @default.
• W2065394006 hasConceptScore W2065394006C146088050 @default.
• W2065394006 hasConceptScore W2065394006C171250308 @default.
• W2065394006 hasConceptScore W2065394006C178790620 @default.
• W2065394006 hasConceptScore W2065394006C185592680 @default.
• W2065394006 hasConceptScore W2065394006C19067145 @default.
• W2065394006 hasConceptScore W2065394006C191897082 @default.
• W2065394006 hasConceptScore W2065394006C191952053 @default.
• W2065394006 hasConceptScore W2065394006C192562407 @default.
• W2065394006 hasConceptScore W2065394006C207521374 @default.
• W2065394006 hasConceptScore W2065394006C2777855556 @default.
• W2065394006 hasConceptScore W2065394006C2779227376 @default.
• W2065394006 hasConceptScore W2065394006C2780081452 @default.
• W2065394006 hasConceptScore W2065394006C2780547777 @default.
• W2065394006 hasConceptScore W2065394006C41823505 @default.
• W2065394006 hasConceptScore W2065394006C43617362 @default.
• W2065394006 hasConceptScore W2065394006C49040817 @default.
• W2065394006 hasConceptScore W2065394006C502230775 @default.
• W2065394006 hasConceptScore W2065394006C544956773 @default.
• W2065394006 hasConceptScore W2065394006C56052488 @default.
• W2065394006 hasConceptScore W2065394006C57863236 @default.
• W2065394006 hasConceptScore W2065394006C66825105 @default.
• W2065394006 hasConceptScore W2065394006C71987851 @default.
• W2065394006 hasConceptScore W2065394006C77671233 @default.
• W2065394006 hasConceptScore W2065394006C8010536 @default.
• W2065394006 hasIssue "2" @default.
• W2065394006 hasLocation W20653940061 @default.
• W2065394006 hasOpenAccess W2065394006 @default.
• W2065394006 hasPrimaryLocation W20653940061 @default.
• W2065394006 hasRelatedWork W1968467978 @default.
• W2065394006 hasRelatedWork W1976252060 @default.
• W2065394006 hasRelatedWork W2019550975 @default.
• W2065394006 hasRelatedWork W2056362178 @default.
• W2065394006 hasRelatedWork W2063403700 @default.
• W2065394006 hasRelatedWork W2073858182 @default.
• W2065394006 hasRelatedWork W2082713480 @default.
• W2065394006 hasRelatedWork W2124029894 @default.
• W2065394006 hasRelatedWork W2139637680 @default.
• W2065394006 hasRelatedWork W2513177783 @default.
• W2065394006 hasVolume "62" @default.
• W2065394006 isParatext "false" @default.
• W2065394006 isRetracted "false" @default.
• W2065394006 magId "2065394006" @default.
• W2065394006 workType "article" @default.