Matches in SemOpenAlex for { <https://semopenalex.org/work/W2065401830> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W2065401830 abstract "A CMOS-compatible backside inductively-coupled-plasma (ICP) deep trench technology has been developed to enhance the performances of RF monolithic inductors and transformers for 30-100 GHz CMOS RFIC applications. The results show that an 112.8% (from 14.37 to 30.58) and a 201.1% (from 6.33 to 19.06) increase in Q-factor, a 9.7% (from 0.91 to 0.998) and a 28.3% (from 0.778 to 0.998) increase in maximum available power gain (GAmax), and a 0.404 dB (from 0.412 dB to 7.6times10-3 dB) and a 1.082 dB (from 1.09 dB to 8.4times10-3 dB) reduction in minimum noise figure (NFmin) were achieved at 30 GHz and 60 GHz, respectively, for a 162.2 pH TL inductor after the backside ICP dry etching. In addition, we demonstrate that high-coupling and ultra-low-loss 30-100 GHz transformers can be achieved by using single-turn two-layer interlaced stacked (STIS) structure implemented in a standard CMOS technology. Significant improvements in Q-factor (from 5.04 to 29.8 at 70 GHz) and G Amax (from 0.885 to 0.984 at 70 GHz) were achieved for the STIS transformers after the ICP etching. Besides, the ICP technology is also capable of improving the isolation between RF/analog and digital circuits and thus paves a way for SOC" @default.
- W2065401830 created "2016-06-24" @default.
- W2065401830 creator A5006733867 @default.
- W2065401830 creator A5054397281 @default.
- W2065401830 creator A5056280218 @default.
- W2065401830 creator A5073280340 @default.
- W2065401830 creator A5078793358 @default.
- W2065401830 creator A5085142676 @default.
- W2065401830 creator A5089338867 @default.
- W2065401830 creator A5089465715 @default.
- W2065401830 date "2007-01-01" @default.
- W2065401830 modified "2023-10-18" @default.
- W2065401830 title "Ultra-Low-Loss and Broadband Micromachined Inductors and Transformers for 30-100 GHz CMOS RFIC Applications by CMOS-Compatible ICP Deep Trench Technology" @default.
- W2065401830 cites W2097246805 @default.
- W2065401830 cites W2102189112 @default.
- W2065401830 cites W2106202027 @default.
- W2065401830 doi "https://doi.org/10.1109/rws.2007.351808" @default.
- W2065401830 hasPublicationYear "2007" @default.
- W2065401830 type Work @default.
- W2065401830 sameAs 2065401830 @default.
- W2065401830 citedByCount "0" @default.
- W2065401830 crossrefType "proceedings-article" @default.
- W2065401830 hasAuthorship W2065401830A5006733867 @default.
- W2065401830 hasAuthorship W2065401830A5054397281 @default.
- W2065401830 hasAuthorship W2065401830A5056280218 @default.
- W2065401830 hasAuthorship W2065401830A5073280340 @default.
- W2065401830 hasAuthorship W2065401830A5078793358 @default.
- W2065401830 hasAuthorship W2065401830A5085142676 @default.
- W2065401830 hasAuthorship W2065401830A5089338867 @default.
- W2065401830 hasAuthorship W2065401830A5089465715 @default.
- W2065401830 hasConcept C112806910 @default.
- W2065401830 hasConcept C119599485 @default.
- W2065401830 hasConcept C121152627 @default.
- W2065401830 hasConcept C127413603 @default.
- W2065401830 hasConcept C128450285 @default.
- W2065401830 hasConcept C144534570 @default.
- W2065401830 hasConcept C165801399 @default.
- W2065401830 hasConcept C187725362 @default.
- W2065401830 hasConcept C192562407 @default.
- W2065401830 hasConcept C194257627 @default.
- W2065401830 hasConcept C46362747 @default.
- W2065401830 hasConcept C49040817 @default.
- W2065401830 hasConcept C66322947 @default.
- W2065401830 hasConcept C74064498 @default.
- W2065401830 hasConcept C97126364 @default.
- W2065401830 hasConceptScore W2065401830C112806910 @default.
- W2065401830 hasConceptScore W2065401830C119599485 @default.
- W2065401830 hasConceptScore W2065401830C121152627 @default.
- W2065401830 hasConceptScore W2065401830C127413603 @default.
- W2065401830 hasConceptScore W2065401830C128450285 @default.
- W2065401830 hasConceptScore W2065401830C144534570 @default.
- W2065401830 hasConceptScore W2065401830C165801399 @default.
- W2065401830 hasConceptScore W2065401830C187725362 @default.
- W2065401830 hasConceptScore W2065401830C192562407 @default.
- W2065401830 hasConceptScore W2065401830C194257627 @default.
- W2065401830 hasConceptScore W2065401830C46362747 @default.
- W2065401830 hasConceptScore W2065401830C49040817 @default.
- W2065401830 hasConceptScore W2065401830C66322947 @default.
- W2065401830 hasConceptScore W2065401830C74064498 @default.
- W2065401830 hasConceptScore W2065401830C97126364 @default.
- W2065401830 hasLocation W20654018301 @default.
- W2065401830 hasOpenAccess W2065401830 @default.
- W2065401830 hasPrimaryLocation W20654018301 @default.
- W2065401830 hasRelatedWork W1966225466 @default.
- W2065401830 hasRelatedWork W1996984702 @default.
- W2065401830 hasRelatedWork W2018906718 @default.
- W2065401830 hasRelatedWork W2092101659 @default.
- W2065401830 hasRelatedWork W2102273191 @default.
- W2065401830 hasRelatedWork W2102963778 @default.
- W2065401830 hasRelatedWork W2112470562 @default.
- W2065401830 hasRelatedWork W2258117021 @default.
- W2065401830 hasRelatedWork W2285868667 @default.
- W2065401830 hasRelatedWork W2317359668 @default.
- W2065401830 isParatext "false" @default.
- W2065401830 isRetracted "false" @default.
- W2065401830 magId "2065401830" @default.
- W2065401830 workType "article" @default.