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- W2065405835 abstract "By the use of Optical Emission Spectroscopy and cathode sheath thickness measurements in ion plating discharges, we have (i) identified the influence of ionisation intensification sources on plasma spatial distribution, (ii) shown that nitrogen dissociative charge exchange in the sheath may be significant under certain conditions, and (iii) found evidence for the possible presence of metal clusters in the discharge. The implications of these findings are discussed." @default.
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- W2065405835 date "1990-01-01" @default.
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- W2065405835 title "Process effects in ion plating" @default.
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- W2065405835 doi "https://doi.org/10.1016/0042-207x(90)94223-d" @default.
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