Matches in SemOpenAlex for { <https://semopenalex.org/work/W2065434472> ?p ?o ?g. }
- W2065434472 endingPage "02B112" @default.
- W2065434472 startingPage "02B112" @default.
- W2065434472 abstract "Data retention characteristics of tungsten nanocrystal (W-NC) memory devices using an oxygen plasma immersion ion implantation (PIII) treatment are investigated. With an increase of oxygen PIII bias voltage and treatment time, the capacitance–voltage hysteresis memory window is increased but the data retention characteristics become degraded. High-resolution transmission electron microscopy images show that this poor data retention is a result of plasma damage on the tunneling oxide layer, which can be prevented by lowering the bias voltage to 7 kV. In addition, by using the elevated temperature retention measurement technique, the effective charge trapping level of the WO3 film surrounding the W-NCs can be extracted. This measurement reveals that a higher oxygen PIII bias voltage and treatment time induces more shallow traps within the WO3 film, degrading the retention behavior of the W-NC memory." @default.
- W2065434472 created "2016-06-24" @default.
- W2065434472 creator A5003916925 @default.
- W2065434472 creator A5006559148 @default.
- W2065434472 creator A5039659628 @default.
- W2065434472 creator A5074356291 @default.
- W2065434472 creator A5076379275 @default.
- W2065434472 creator A5087427671 @default.
- W2065434472 date "2014-03-01" @default.
- W2065434472 modified "2023-10-16" @default.
- W2065434472 title "Oxygen plasma immersion ion implantation treatment to enhance data retention of tungsten nanocrystal nonvolatile memory" @default.
- W2065434472 cites W1980928533 @default.
- W2065434472 cites W1983217103 @default.
- W2065434472 cites W1984153272 @default.
- W2065434472 cites W1985112541 @default.
- W2065434472 cites W1985517961 @default.
- W2065434472 cites W1998847764 @default.
- W2065434472 cites W2014725811 @default.
- W2065434472 cites W2021625187 @default.
- W2065434472 cites W2038615916 @default.
- W2065434472 cites W2040867426 @default.
- W2065434472 cites W2045940497 @default.
- W2065434472 cites W2052259315 @default.
- W2065434472 cites W2052961068 @default.
- W2065434472 cites W2055323063 @default.
- W2065434472 cites W2062171632 @default.
- W2065434472 cites W2066527163 @default.
- W2065434472 cites W2074709925 @default.
- W2065434472 cites W2094995307 @default.
- W2065434472 cites W2139304324 @default.
- W2065434472 cites W2170323059 @default.
- W2065434472 doi "https://doi.org/10.1116/1.4858600" @default.
- W2065434472 hasPublicationYear "2014" @default.
- W2065434472 type Work @default.
- W2065434472 sameAs 2065434472 @default.
- W2065434472 citedByCount "1" @default.
- W2065434472 countsByYear W20654344722015 @default.
- W2065434472 crossrefType "journal-article" @default.
- W2065434472 hasAuthorship W2065434472A5003916925 @default.
- W2065434472 hasAuthorship W2065434472A5006559148 @default.
- W2065434472 hasAuthorship W2065434472A5039659628 @default.
- W2065434472 hasAuthorship W2065434472A5074356291 @default.
- W2065434472 hasAuthorship W2065434472A5076379275 @default.
- W2065434472 hasAuthorship W2065434472A5087427671 @default.
- W2065434472 hasConcept C113196181 @default.
- W2065434472 hasConcept C119599485 @default.
- W2065434472 hasConcept C121332964 @default.
- W2065434472 hasConcept C127413603 @default.
- W2065434472 hasConcept C145148216 @default.
- W2065434472 hasConcept C146088050 @default.
- W2065434472 hasConcept C147789679 @default.
- W2065434472 hasConcept C165801399 @default.
- W2065434472 hasConcept C171250308 @default.
- W2065434472 hasConcept C172385210 @default.
- W2065434472 hasConcept C17525397 @default.
- W2065434472 hasConcept C175854130 @default.
- W2065434472 hasConcept C177950962 @default.
- W2065434472 hasConcept C178790620 @default.
- W2065434472 hasConcept C185592680 @default.
- W2065434472 hasConcept C191897082 @default.
- W2065434472 hasConcept C192562407 @default.
- W2065434472 hasConcept C195370968 @default.
- W2065434472 hasConcept C20254490 @default.
- W2065434472 hasConcept C2778702798 @default.
- W2065434472 hasConcept C2779851234 @default.
- W2065434472 hasConcept C2780866740 @default.
- W2065434472 hasConcept C30066665 @default.
- W2065434472 hasConcept C3020018676 @default.
- W2065434472 hasConcept C41823505 @default.
- W2065434472 hasConcept C43617362 @default.
- W2065434472 hasConcept C49040817 @default.
- W2065434472 hasConcept C540031477 @default.
- W2065434472 hasConcept C542268612 @default.
- W2065434472 hasConcept C62520636 @default.
- W2065434472 hasConcept C82706917 @default.
- W2065434472 hasConceptScore W2065434472C113196181 @default.
- W2065434472 hasConceptScore W2065434472C119599485 @default.
- W2065434472 hasConceptScore W2065434472C121332964 @default.
- W2065434472 hasConceptScore W2065434472C127413603 @default.
- W2065434472 hasConceptScore W2065434472C145148216 @default.
- W2065434472 hasConceptScore W2065434472C146088050 @default.
- W2065434472 hasConceptScore W2065434472C147789679 @default.
- W2065434472 hasConceptScore W2065434472C165801399 @default.
- W2065434472 hasConceptScore W2065434472C171250308 @default.
- W2065434472 hasConceptScore W2065434472C172385210 @default.
- W2065434472 hasConceptScore W2065434472C17525397 @default.
- W2065434472 hasConceptScore W2065434472C175854130 @default.
- W2065434472 hasConceptScore W2065434472C177950962 @default.
- W2065434472 hasConceptScore W2065434472C178790620 @default.
- W2065434472 hasConceptScore W2065434472C185592680 @default.
- W2065434472 hasConceptScore W2065434472C191897082 @default.
- W2065434472 hasConceptScore W2065434472C192562407 @default.
- W2065434472 hasConceptScore W2065434472C195370968 @default.
- W2065434472 hasConceptScore W2065434472C20254490 @default.
- W2065434472 hasConceptScore W2065434472C2778702798 @default.
- W2065434472 hasConceptScore W2065434472C2779851234 @default.
- W2065434472 hasConceptScore W2065434472C2780866740 @default.
- W2065434472 hasConceptScore W2065434472C30066665 @default.