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- W2065441879 abstract "The authors propose and demonstrate direct electron-beam writing of surface relief diffractive elements into hybrid inorganic/organic sol-gel glass films. The etch depth and phase delay can be controlled by the electron dose. The potential applications include multi-phase-level diffractive elements and apodised planar waveguide gratings." @default.
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- W2065441879 date "1998-01-01" @default.
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- W2065441879 title "Sol-gel hybrid glass diffractive elements by direct electron-beam exposure" @default.
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