FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2065487054> ?p ?o ?g. }

• W2065487054 endingPage "556" @default.
• W2065487054 startingPage "549" @default.
• W2065487054 abstract "A variety of silicon foundry processes available for microsystem implementation are available at the present time. The manufacturing methods and the associated process tolerances employed at a particular foundry will determine the performance of the finished devices. Moreover, micro-electro-mechanical systems (MEMS) often require processes that are difficult to control. Device-to-device variations can occur even in batch microfabricated systems. One particular limitation of MEMS foundry processes, in general, is associated with non-classical boundary support conditions due to over/under etching of silicon. These non-classical support conditions will affect the static and dynamic performance of the microsystem. This condition has important implications in atomic force microscopy applications where the targeted natural frequencies are given a wide tolerance due in large part to microfabrication limitations. This paper presents the boundary characterization of single crystal silicon microcantilevers through thermo-mechanical testing. A non-contact optical sensing approach is used for the experimentation. The Rayleigh–Ritz energy method incorporating boundary characteristic orthogonal polynomials is used for the prediction analysis." @default.
• W2065487054 created "2016-06-24" @default.
• W2065487054 creator A5014802113 @default.
• W2065487054 creator A5030049184 @default.
• W2065487054 creator A5065429767 @default.
• W2065487054 date "2006-02-06" @default.
• W2065487054 modified "2023-09-26" @default.
• W2065487054 title "Boundary characterization of microstructures through thermo-mechanical testing" @default.
• W2065487054 cites W1964627615 @default.
• W2065487054 cites W1966861490 @default.
• W2065487054 cites W1968895214 @default.
• W2065487054 cites W1969878278 @default.
• W2065487054 cites W1971142069 @default.
• W2065487054 cites W1990582806 @default.
• W2065487054 cites W1992751219 @default.
• W2065487054 cites W1993004731 @default.
• W2065487054 cites W2007762999 @default.
• W2065487054 cites W2022789869 @default.
• W2065487054 cites W2026039974 @default.
• W2065487054 cites W2057213849 @default.
• W2065487054 cites W2074919419 @default.
• W2065487054 cites W2079471272 @default.
• W2065487054 cites W207967324 @default.
• W2065487054 cites W2084654326 @default.
• W2065487054 cites W2106949717 @default.
• W2065487054 cites W2135704013 @default.
• W2065487054 cites W2156690225 @default.
• W2065487054 cites W2161169472 @default.
• W2065487054 cites W3150391404 @default.
• W2065487054 doi "https://doi.org/10.1088/0960-1317/16/3/010" @default.
• W2065487054 hasPublicationYear "2006" @default.
• W2065487054 type Work @default.
• W2065487054 sameAs 2065487054 @default.
• W2065487054 citedByCount "15" @default.
• W2065487054 countsByYear W20654870542013 @default.
• W2065487054 countsByYear W20654870542016 @default.
• W2065487054 countsByYear W20654870542017 @default.
• W2065487054 crossrefType "journal-article" @default.
• W2065487054 hasAuthorship W2065487054A5014802113 @default.
• W2065487054 hasAuthorship W2065487054A5030049184 @default.
• W2065487054 hasAuthorship W2065487054A5065429767 @default.
• W2065487054 hasConcept C100460472 @default.
• W2065487054 hasConcept C127413603 @default.
• W2065487054 hasConcept C134306372 @default.
• W2065487054 hasConcept C136525101 @default.
• W2065487054 hasConcept C142724271 @default.
• W2065487054 hasConcept C151054161 @default.
• W2065487054 hasConcept C171250308 @default.
• W2065487054 hasConcept C182310444 @default.
• W2065487054 hasConcept C192562407 @default.
• W2065487054 hasConcept C204787440 @default.
• W2065487054 hasConcept C2778939432 @default.
• W2065487054 hasConcept C2779227376 @default.
• W2065487054 hasConcept C2780841128 @default.
• W2065487054 hasConcept C2781087836 @default.
• W2065487054 hasConcept C33923547 @default.
• W2065487054 hasConcept C37977207 @default.
• W2065487054 hasConcept C41008148 @default.
• W2065487054 hasConcept C49040817 @default.
• W2065487054 hasConcept C527607 @default.
• W2065487054 hasConcept C544956773 @default.
• W2065487054 hasConcept C57528182 @default.
• W2065487054 hasConcept C62354387 @default.
• W2065487054 hasConcept C71924100 @default.
• W2065487054 hasConcept C78519656 @default.
• W2065487054 hasConceptScore W2065487054C100460472 @default.
• W2065487054 hasConceptScore W2065487054C127413603 @default.
• W2065487054 hasConceptScore W2065487054C134306372 @default.
• W2065487054 hasConceptScore W2065487054C136525101 @default.
• W2065487054 hasConceptScore W2065487054C142724271 @default.
• W2065487054 hasConceptScore W2065487054C151054161 @default.
• W2065487054 hasConceptScore W2065487054C171250308 @default.
• W2065487054 hasConceptScore W2065487054C182310444 @default.
• W2065487054 hasConceptScore W2065487054C192562407 @default.
• W2065487054 hasConceptScore W2065487054C204787440 @default.
• W2065487054 hasConceptScore W2065487054C2778939432 @default.
• W2065487054 hasConceptScore W2065487054C2779227376 @default.
• W2065487054 hasConceptScore W2065487054C2780841128 @default.
• W2065487054 hasConceptScore W2065487054C2781087836 @default.
• W2065487054 hasConceptScore W2065487054C33923547 @default.
• W2065487054 hasConceptScore W2065487054C37977207 @default.
• W2065487054 hasConceptScore W2065487054C41008148 @default.
• W2065487054 hasConceptScore W2065487054C49040817 @default.
• W2065487054 hasConceptScore W2065487054C527607 @default.
• W2065487054 hasConceptScore W2065487054C544956773 @default.
• W2065487054 hasConceptScore W2065487054C57528182 @default.
• W2065487054 hasConceptScore W2065487054C62354387 @default.
• W2065487054 hasConceptScore W2065487054C71924100 @default.
• W2065487054 hasConceptScore W2065487054C78519656 @default.
• W2065487054 hasIssue "3" @default.
• W2065487054 hasLocation W20654870541 @default.
• W2065487054 hasOpenAccess W2065487054 @default.
• W2065487054 hasPrimaryLocation W20654870541 @default.
• W2065487054 hasRelatedWork W1983636608 @default.
• W2065487054 hasRelatedWork W198894032 @default.
• W2065487054 hasRelatedWork W2060870204 @default.
• W2065487054 hasRelatedWork W2067043387 @default.
• W2065487054 hasRelatedWork W2090011643 @default.

• next