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- W2065537269 abstract "Retarding field immersion lenses are coming into wide-spread use for focusing low energy electron and ion beams. One disadvantage is that any sample non-flatness will distort the focusing field. A more recent variant is a non-immersion retarding field lens, in which the sample is located outside the retarding field. We describe here a simple model and analysis which predicts that the performance of such a lens is competitive with the retarding immersion lens. With this lens design, it should be possible to focus a 1 keV electron beam with an energy spread of 1 eV into a spot of 4 nm diameter using realistic values of maximum voltage and retarding field strength. The effective resolution under these conditions is estimated to be 1.4 nm." @default.
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- W2065537269 date "1995-09-25" @default.
- W2065537269 modified "2023-09-23" @default.
- W2065537269 title "<title>Retarding field optics with field-free sample</title>" @default.
- W2065537269 doi "https://doi.org/10.1117/12.221588" @default.
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