Matches in SemOpenAlex for { <https://semopenalex.org/work/W2065682302> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2065682302 endingPage "66" @default.
- W2065682302 startingPage "64" @default.
- W2065682302 abstract "Si epitaxial growth from solution in solid Al onto crystal Si substrates was studied by scanning electron microscopy. Growth in reentrant corners of the substrate was found to be favored over growth onto a flat surface. For this reason, the smaller-diameter oxide cuts used in integrated-circuit fabrication, in which no portion of the exposed substrate Si is far from a reentrant corner, are favored sites for growth. Si growth readily fills in such oxide cuts forming mesa structures potentially useful in device construction. The probable cause for such preferential growth was indicated in pressure experiments which show that regions in the solid Al under relatively less compression are favored locations for growth." @default.
- W2065682302 created "2016-06-24" @default.
- W2065682302 creator A5061505722 @default.
- W2065682302 creator A5086700420 @default.
- W2065682302 creator A5086834919 @default.
- W2065682302 date "1973-01-15" @default.
- W2065682302 modified "2023-10-14" @default.
- W2065682302 title "Solid-phase epitaxial growth of Si mesas from al metallization" @default.
- W2065682302 cites W2015548401 @default.
- W2065682302 cites W2057915426 @default.
- W2065682302 cites W2061518622 @default.
- W2065682302 doi "https://doi.org/10.1063/1.1654558" @default.
- W2065682302 hasPublicationYear "1973" @default.
- W2065682302 type Work @default.
- W2065682302 sameAs 2065682302 @default.
- W2065682302 citedByCount "78" @default.
- W2065682302 countsByYear W20656823022013 @default.
- W2065682302 countsByYear W20656823022018 @default.
- W2065682302 countsByYear W20656823022021 @default.
- W2065682302 crossrefType "journal-article" @default.
- W2065682302 hasAuthorship W2065682302A5061505722 @default.
- W2065682302 hasAuthorship W2065682302A5086700420 @default.
- W2065682302 hasAuthorship W2065682302A5086834919 @default.
- W2065682302 hasBestOaLocation W20656823022 @default.
- W2065682302 hasConcept C110738630 @default.
- W2065682302 hasConcept C111368507 @default.
- W2065682302 hasConcept C121332964 @default.
- W2065682302 hasConcept C127313418 @default.
- W2065682302 hasConcept C136525101 @default.
- W2065682302 hasConcept C142724271 @default.
- W2065682302 hasConcept C159985019 @default.
- W2065682302 hasConcept C161406801 @default.
- W2065682302 hasConcept C171250308 @default.
- W2065682302 hasConcept C178790620 @default.
- W2065682302 hasConcept C185592680 @default.
- W2065682302 hasConcept C191897082 @default.
- W2065682302 hasConcept C192562407 @default.
- W2065682302 hasConcept C204787440 @default.
- W2065682302 hasConcept C26456737 @default.
- W2065682302 hasConcept C26771246 @default.
- W2065682302 hasConcept C26873012 @default.
- W2065682302 hasConcept C2777289219 @default.
- W2065682302 hasConcept C2779227376 @default.
- W2065682302 hasConcept C2779851234 @default.
- W2065682302 hasConcept C44280652 @default.
- W2065682302 hasConcept C49040817 @default.
- W2065682302 hasConcept C544956773 @default.
- W2065682302 hasConcept C71924100 @default.
- W2065682302 hasConcept C8010536 @default.
- W2065682302 hasConceptScore W2065682302C110738630 @default.
- W2065682302 hasConceptScore W2065682302C111368507 @default.
- W2065682302 hasConceptScore W2065682302C121332964 @default.
- W2065682302 hasConceptScore W2065682302C127313418 @default.
- W2065682302 hasConceptScore W2065682302C136525101 @default.
- W2065682302 hasConceptScore W2065682302C142724271 @default.
- W2065682302 hasConceptScore W2065682302C159985019 @default.
- W2065682302 hasConceptScore W2065682302C161406801 @default.
- W2065682302 hasConceptScore W2065682302C171250308 @default.
- W2065682302 hasConceptScore W2065682302C178790620 @default.
- W2065682302 hasConceptScore W2065682302C185592680 @default.
- W2065682302 hasConceptScore W2065682302C191897082 @default.
- W2065682302 hasConceptScore W2065682302C192562407 @default.
- W2065682302 hasConceptScore W2065682302C204787440 @default.
- W2065682302 hasConceptScore W2065682302C26456737 @default.
- W2065682302 hasConceptScore W2065682302C26771246 @default.
- W2065682302 hasConceptScore W2065682302C26873012 @default.
- W2065682302 hasConceptScore W2065682302C2777289219 @default.
- W2065682302 hasConceptScore W2065682302C2779227376 @default.
- W2065682302 hasConceptScore W2065682302C2779851234 @default.
- W2065682302 hasConceptScore W2065682302C44280652 @default.
- W2065682302 hasConceptScore W2065682302C49040817 @default.
- W2065682302 hasConceptScore W2065682302C544956773 @default.
- W2065682302 hasConceptScore W2065682302C71924100 @default.
- W2065682302 hasConceptScore W2065682302C8010536 @default.
- W2065682302 hasIssue "2" @default.
- W2065682302 hasLocation W20656823021 @default.
- W2065682302 hasLocation W20656823022 @default.
- W2065682302 hasOpenAccess W2065682302 @default.
- W2065682302 hasPrimaryLocation W20656823021 @default.
- W2065682302 hasRelatedWork W1620537324 @default.
- W2065682302 hasRelatedWork W1986084019 @default.
- W2065682302 hasRelatedWork W2031128795 @default.
- W2065682302 hasRelatedWork W2082914599 @default.
- W2065682302 hasRelatedWork W2517736439 @default.
- W2065682302 hasRelatedWork W2595526034 @default.
- W2065682302 hasRelatedWork W2962924622 @default.
- W2065682302 hasRelatedWork W3172026368 @default.
- W2065682302 hasRelatedWork W75954229 @default.
- W2065682302 hasRelatedWork W3104715250 @default.
- W2065682302 hasVolume "22" @default.
- W2065682302 isParatext "false" @default.
- W2065682302 isRetracted "false" @default.
- W2065682302 magId "2065682302" @default.
- W2065682302 workType "article" @default.