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- W2065755429 abstract "50 μm thick polyimide (Kapton, PI) foils were irradiated with 100 keV He+, Ne+, Ar+ and Kr+ ions to fluences from 1×1012 to 1×1016 cm−2, and the structural and compositional changes in the polymer surface layer, degraded by the ion bombardment, were studied by RBS and ERDA techniques. The sheet resistance at room temperature was also measured. Significant hydrogen and oxygen depletion is observed for the ion fluences above 1×1014 cm−2 in the PI surface layer, the thickness of which is an increasing function of the ion projected range. Measured H and O depth profiles are structureless with the concentration monotonically increasing from the sample surface to the sample bulk where it achieves the value typical for pristine PI. The sheet resistance remains unchanged up to the fluence of 1014 cm−2 and then it declines rapidly by several orders of magnitude, the decline being more pronounced for heavier ions." @default.
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- W2065755429 date "2001-04-01" @default.
- W2065755429 modified "2023-10-17" @default.
- W2065755429 title "Degradation of polyimide by 100 keV He+, Ne+, Ar+ and Kr+ ions" @default.
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- W2065755429 doi "https://doi.org/10.1016/s0168-583x(00)00557-7" @default.
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