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• W2065882502 abstract "Abstract In the present paper the change of the partial pressure of nitrogen during reactive dc triode sputtering of a Ta target in Ar+N 2 gas mixture is spectroscopically investigated by means of a quadrupole mass spectrometer. AES analysis of thin films, deposited at different N 2 partial pressures is carried out and the atomic concentration of the contaminants in the films is investigated. It is established that the change of nitrogen content in the sputtering gas and in the deposited films at different N 2 partial pressures is connected with a nitridation of the Ta target." @default.
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• W2065882502 date "1985-02-01" @default.
• W2065882502 modified "2023-09-23" @default.
• W2065882502 title "Spectroscopic investigation of tantalum nitride thin film deposition by reactive sputtering in a triode system" @default.
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• W2065882502 doi "https://doi.org/10.1016/0042-207x(85)90018-1" @default.
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