Matches in SemOpenAlex for { <https://semopenalex.org/work/W2065888967> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2065888967 endingPage "263" @default.
- W2065888967 startingPage "263" @default.
- W2065888967 abstract "Samples from a silicon wafer containing a boron doped delta layer were exposed to plasma oxidation and rapid thermal processing (RTP). It is demonstrated experimentally for the first time that there is no enhanced diffusion resulting from oxidation by plasma anodisation, making it well suited to complement low temperature processing." @default.
- W2065888967 created "2016-06-24" @default.
- W2065888967 creator A5012324785 @default.
- W2065888967 creator A5014454999 @default.
- W2065888967 creator A5018211051 @default.
- W2065888967 creator A5024662163 @default.
- W2065888967 creator A5057836550 @default.
- W2065888967 creator A5068093186 @default.
- W2065888967 date "1993-01-01" @default.
- W2065888967 modified "2023-09-23" @default.
- W2065888967 title "Diffusion of delta doped boron in silicon following oxidation" @default.
- W2065888967 cites W2024640776 @default.
- W2065888967 cites W2052185318 @default.
- W2065888967 cites W2064770548 @default.
- W2065888967 doi "https://doi.org/10.1049/el:19930180" @default.
- W2065888967 hasPublicationYear "1993" @default.
- W2065888967 type Work @default.
- W2065888967 sameAs 2065888967 @default.
- W2065888967 citedByCount "3" @default.
- W2065888967 crossrefType "journal-article" @default.
- W2065888967 hasAuthorship W2065888967A5012324785 @default.
- W2065888967 hasAuthorship W2065888967A5014454999 @default.
- W2065888967 hasAuthorship W2065888967A5018211051 @default.
- W2065888967 hasAuthorship W2065888967A5024662163 @default.
- W2065888967 hasAuthorship W2065888967A5057836550 @default.
- W2065888967 hasAuthorship W2065888967A5068093186 @default.
- W2065888967 hasConcept C113196181 @default.
- W2065888967 hasConcept C121332964 @default.
- W2065888967 hasConcept C127413603 @default.
- W2065888967 hasConcept C160671074 @default.
- W2065888967 hasConcept C171250308 @default.
- W2065888967 hasConcept C178790620 @default.
- W2065888967 hasConcept C185592680 @default.
- W2065888967 hasConcept C192562407 @default.
- W2065888967 hasConcept C2779227376 @default.
- W2065888967 hasConcept C2779281663 @default.
- W2065888967 hasConcept C42360764 @default.
- W2065888967 hasConcept C43617362 @default.
- W2065888967 hasConcept C49040817 @default.
- W2065888967 hasConcept C501308230 @default.
- W2065888967 hasConcept C544956773 @default.
- W2065888967 hasConcept C57863236 @default.
- W2065888967 hasConcept C62520636 @default.
- W2065888967 hasConcept C69357855 @default.
- W2065888967 hasConcept C72832162 @default.
- W2065888967 hasConcept C82706917 @default.
- W2065888967 hasConcept C97355855 @default.
- W2065888967 hasConceptScore W2065888967C113196181 @default.
- W2065888967 hasConceptScore W2065888967C121332964 @default.
- W2065888967 hasConceptScore W2065888967C127413603 @default.
- W2065888967 hasConceptScore W2065888967C160671074 @default.
- W2065888967 hasConceptScore W2065888967C171250308 @default.
- W2065888967 hasConceptScore W2065888967C178790620 @default.
- W2065888967 hasConceptScore W2065888967C185592680 @default.
- W2065888967 hasConceptScore W2065888967C192562407 @default.
- W2065888967 hasConceptScore W2065888967C2779227376 @default.
- W2065888967 hasConceptScore W2065888967C2779281663 @default.
- W2065888967 hasConceptScore W2065888967C42360764 @default.
- W2065888967 hasConceptScore W2065888967C43617362 @default.
- W2065888967 hasConceptScore W2065888967C49040817 @default.
- W2065888967 hasConceptScore W2065888967C501308230 @default.
- W2065888967 hasConceptScore W2065888967C544956773 @default.
- W2065888967 hasConceptScore W2065888967C57863236 @default.
- W2065888967 hasConceptScore W2065888967C62520636 @default.
- W2065888967 hasConceptScore W2065888967C69357855 @default.
- W2065888967 hasConceptScore W2065888967C72832162 @default.
- W2065888967 hasConceptScore W2065888967C82706917 @default.
- W2065888967 hasConceptScore W2065888967C97355855 @default.
- W2065888967 hasIssue "3" @default.
- W2065888967 hasLocation W20658889671 @default.
- W2065888967 hasOpenAccess W2065888967 @default.
- W2065888967 hasPrimaryLocation W20658889671 @default.
- W2065888967 hasRelatedWork W1964478537 @default.
- W2065888967 hasRelatedWork W1964647394 @default.
- W2065888967 hasRelatedWork W1976707706 @default.
- W2065888967 hasRelatedWork W2011034876 @default.
- W2065888967 hasRelatedWork W2034274768 @default.
- W2065888967 hasRelatedWork W2039043163 @default.
- W2065888967 hasRelatedWork W2065888967 @default.
- W2065888967 hasRelatedWork W2120104261 @default.
- W2065888967 hasRelatedWork W2885471602 @default.
- W2065888967 hasRelatedWork W2086742598 @default.
- W2065888967 hasVolume "29" @default.
- W2065888967 isParatext "false" @default.
- W2065888967 isRetracted "false" @default.
- W2065888967 magId "2065888967" @default.
- W2065888967 workType "article" @default.