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- W2065895720 abstract "In this Letter, we report on the near-surface modification of fused silica by applying a hydrogenous atmospheric pressure plasma jet at ambient temperature. A significant decrease in UV-transmission due to this plasma treatment was observed. By the use of secondary ion mass spectroscopy, the composition of the plasma-modified glass surface was investigated. It was found that the plasma treatment led to a reduction of a 100 nm thick SiO2 layer to SiOx of gradual depth-dependent composition. For this plasma-induced layer, depth-resolved characteristic optical parameters, such as index of refraction and dispersion, were determined. Further, a significant plasma-induced increase of the concentration of hydrogen in the bulk material was measured. The decrease in transmission is explained by the plasma-induced near-surface formation of SiOx on the one hand and the diffusion of hydrogen into the bulk material on the other hand." @default.
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- W2065895720 date "2012-02-08" @default.
- W2065895720 modified "2023-09-30" @default.
- W2065895720 title "Near-surface modification of optical properties of fused silica by low-temperature hydrogenous atmospheric pressure plasma" @default.
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- W2065895720 doi "https://doi.org/10.1364/ol.37.000566" @default.
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