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- W2065931034 abstract "Thepaperpresents the design of a new micro-hotplate.Useplatinum filament as electrode material, Si and SiO 2 assubstrate materials.Through the structure optimizing analysis, the micro-hotplate owns the best temperature distribution, when the thickness of Si, the front and rear SiO 2 are set to 125, 25 and 150 μmrespectively, the width of heating electrode is 50μm and the measuring electrode is withoutinterdigital electrode. The new micro-hotplate is benefit for the improvement of sensitivity and overall performance of the sensor." @default.
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- W2065931034 date "2014-07-01" @default.
- W2065931034 modified "2023-09-26" @default.
- W2065931034 title "Structure Optimization of a New Micro-Hotplate Designed for Gas Sensor" @default.
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- W2065931034 doi "https://doi.org/10.4028/www.scientific.net/amm.574.498" @default.
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