Matches in SemOpenAlex for { <https://semopenalex.org/work/W2066021902> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2066021902 endingPage "1372" @default.
- W2066021902 startingPage "1371" @default.
- W2066021902 abstract "This letter reports a procedure for low-temperature nitridation of silicon surfaces using species produced by NH3 catalytic decomposition on heated tungsten in a catalytic chemical vapor deposition system. The surface of Si(100) was nitrided at temperatures as low as 200 °C. Silicon oxinitride films are obtained with a stoichiometry Si:N:O=1:0.9:0.3, a maximum thickness as high as 4.8 nm and an electrical breakdown field of 6 MV/cm." @default.
- W2066021902 created "2016-06-24" @default.
- W2066021902 creator A5021173461 @default.
- W2066021902 creator A5041893900 @default.
- W2066021902 date "1997-09-08" @default.
- W2066021902 modified "2023-09-23" @default.
- W2066021902 title "Low-temperature nitridation of silicon surface using NH3-decomposed species in a catalytic chemical vapor deposition system" @default.
- W2066021902 cites W1974623876 @default.
- W2066021902 cites W1981719382 @default.
- W2066021902 cites W2002474313 @default.
- W2066021902 cites W2033086321 @default.
- W2066021902 cites W2068127701 @default.
- W2066021902 cites W2077456191 @default.
- W2066021902 cites W2079565232 @default.
- W2066021902 cites W2091342012 @default.
- W2066021902 cites W2093548448 @default.
- W2066021902 cites W2146982919 @default.
- W2066021902 doi "https://doi.org/10.1063/1.119897" @default.
- W2066021902 hasPublicationYear "1997" @default.
- W2066021902 type Work @default.
- W2066021902 sameAs 2066021902 @default.
- W2066021902 citedByCount "45" @default.
- W2066021902 countsByYear W20660219022012 @default.
- W2066021902 countsByYear W20660219022015 @default.
- W2066021902 countsByYear W20660219022017 @default.
- W2066021902 countsByYear W20660219022018 @default.
- W2066021902 countsByYear W20660219022019 @default.
- W2066021902 countsByYear W20660219022023 @default.
- W2066021902 crossrefType "journal-article" @default.
- W2066021902 hasAuthorship W2066021902A5021173461 @default.
- W2066021902 hasAuthorship W2066021902A5041893900 @default.
- W2066021902 hasConcept C107872376 @default.
- W2066021902 hasConcept C113196181 @default.
- W2066021902 hasConcept C124681953 @default.
- W2066021902 hasConcept C127413603 @default.
- W2066021902 hasConcept C13862629 @default.
- W2066021902 hasConcept C144082473 @default.
- W2066021902 hasConcept C147789679 @default.
- W2066021902 hasConcept C151730666 @default.
- W2066021902 hasConcept C161790260 @default.
- W2066021902 hasConcept C171250308 @default.
- W2066021902 hasConcept C178790620 @default.
- W2066021902 hasConcept C179104552 @default.
- W2066021902 hasConcept C185592680 @default.
- W2066021902 hasConcept C191897082 @default.
- W2066021902 hasConcept C192562407 @default.
- W2066021902 hasConcept C2779227376 @default.
- W2066021902 hasConcept C2816523 @default.
- W2066021902 hasConcept C42360764 @default.
- W2066021902 hasConcept C542268612 @default.
- W2066021902 hasConcept C544956773 @default.
- W2066021902 hasConcept C57410435 @default.
- W2066021902 hasConcept C64297162 @default.
- W2066021902 hasConcept C86803240 @default.
- W2066021902 hasConceptScore W2066021902C107872376 @default.
- W2066021902 hasConceptScore W2066021902C113196181 @default.
- W2066021902 hasConceptScore W2066021902C124681953 @default.
- W2066021902 hasConceptScore W2066021902C127413603 @default.
- W2066021902 hasConceptScore W2066021902C13862629 @default.
- W2066021902 hasConceptScore W2066021902C144082473 @default.
- W2066021902 hasConceptScore W2066021902C147789679 @default.
- W2066021902 hasConceptScore W2066021902C151730666 @default.
- W2066021902 hasConceptScore W2066021902C161790260 @default.
- W2066021902 hasConceptScore W2066021902C171250308 @default.
- W2066021902 hasConceptScore W2066021902C178790620 @default.
- W2066021902 hasConceptScore W2066021902C179104552 @default.
- W2066021902 hasConceptScore W2066021902C185592680 @default.
- W2066021902 hasConceptScore W2066021902C191897082 @default.
- W2066021902 hasConceptScore W2066021902C192562407 @default.
- W2066021902 hasConceptScore W2066021902C2779227376 @default.
- W2066021902 hasConceptScore W2066021902C2816523 @default.
- W2066021902 hasConceptScore W2066021902C42360764 @default.
- W2066021902 hasConceptScore W2066021902C542268612 @default.
- W2066021902 hasConceptScore W2066021902C544956773 @default.
- W2066021902 hasConceptScore W2066021902C57410435 @default.
- W2066021902 hasConceptScore W2066021902C64297162 @default.
- W2066021902 hasConceptScore W2066021902C86803240 @default.
- W2066021902 hasIssue "10" @default.
- W2066021902 hasLocation W20660219021 @default.
- W2066021902 hasOpenAccess W2066021902 @default.
- W2066021902 hasPrimaryLocation W20660219021 @default.
- W2066021902 hasRelatedWork W1560800549 @default.
- W2066021902 hasRelatedWork W1977851291 @default.
- W2066021902 hasRelatedWork W2001419146 @default.
- W2066021902 hasRelatedWork W2066021902 @default.
- W2066021902 hasRelatedWork W2090265853 @default.
- W2066021902 hasRelatedWork W2104642710 @default.
- W2066021902 hasRelatedWork W2739042051 @default.
- W2066021902 hasRelatedWork W3012118934 @default.
- W2066021902 hasRelatedWork W4207045224 @default.
- W2066021902 hasRelatedWork W4241640169 @default.
- W2066021902 hasVolume "71" @default.
- W2066021902 isParatext "false" @default.
- W2066021902 isRetracted "false" @default.
- W2066021902 magId "2066021902" @default.
- W2066021902 workType "article" @default.