Matches in SemOpenAlex for { <https://semopenalex.org/work/W2066044088> ?p ?o ?g. }
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- W2066044088 endingPage "156" @default.
- W2066044088 startingPage "152" @default.
- W2066044088 abstract "In this work a planar, radio frequency induction plasma source is characterized in terms of ion density, electron temperature, and plasma potential using a single Langmuir probe in oxygen and noble gases. Probe measurements of density were also verified using microwave interferometry. Measured argon ion densities increase nearly linearly with power from 1×1011 cm−3 at 300 W rf power to 6×1011 cm−3 at 1.2 kW at 1×10−3 Torr. Krypton ion densities are also linear with power but saturate above 1 kW at a density of 2×1012 cm−3 at 1×10−3 Torr. Electron temperatures increase with decreasing pressure from 3 eV at 26×10−3 Torr to 7 eV at 0.3×10−3 Torr. Plasma potentials are typically 15–30 V and increase with decreasing pressure. Ion saturation current in oxygen at 5×10−3 Torr is 2.5% uniform over diagonals of 20 cm when a magnetic multipole bucket is used to confine the plasma. Ion generation energy cost in argon is 100–250 W/A." @default.
- W2066044088 created "2016-06-24" @default.
- W2066044088 creator A5024257779 @default.
- W2066044088 creator A5032637366 @default.
- W2066044088 creator A5056795133 @default.
- W2066044088 creator A5079887149 @default.
- W2066044088 date "1993-01-01" @default.
- W2066044088 modified "2023-10-10" @default.
- W2066044088 title "Langmuir probe measurements of a radio frequency induction plasma" @default.
- W2066044088 doi "https://doi.org/10.1116/1.578282" @default.
- W2066044088 hasPublicationYear "1993" @default.
- W2066044088 type Work @default.
- W2066044088 sameAs 2066044088 @default.
- W2066044088 citedByCount "237" @default.
- W2066044088 countsByYear W20660440882012 @default.
- W2066044088 countsByYear W20660440882013 @default.
- W2066044088 countsByYear W20660440882014 @default.
- W2066044088 countsByYear W20660440882015 @default.
- W2066044088 countsByYear W20660440882016 @default.
- W2066044088 countsByYear W20660440882017 @default.
- W2066044088 countsByYear W20660440882018 @default.
- W2066044088 countsByYear W20660440882019 @default.
- W2066044088 countsByYear W20660440882020 @default.
- W2066044088 countsByYear W20660440882021 @default.
- W2066044088 countsByYear W20660440882022 @default.
- W2066044088 countsByYear W20660440882023 @default.
- W2066044088 crossrefType "journal-article" @default.
- W2066044088 hasAuthorship W2066044088A5024257779 @default.
- W2066044088 hasAuthorship W2066044088A5032637366 @default.
- W2066044088 hasAuthorship W2066044088A5056795133 @default.
- W2066044088 hasAuthorship W2066044088A5079887149 @default.
- W2066044088 hasConcept C113196181 @default.
- W2066044088 hasConcept C121332964 @default.
- W2066044088 hasConcept C145148216 @default.
- W2066044088 hasConcept C176118016 @default.
- W2066044088 hasConcept C178790620 @default.
- W2066044088 hasConcept C184779094 @default.
- W2066044088 hasConcept C185592680 @default.
- W2066044088 hasConcept C192039680 @default.
- W2066044088 hasConcept C22175881 @default.
- W2066044088 hasConcept C30646810 @default.
- W2066044088 hasConcept C43503373 @default.
- W2066044088 hasConcept C43617362 @default.
- W2066044088 hasConcept C521692839 @default.
- W2066044088 hasConcept C547737533 @default.
- W2066044088 hasConcept C548442186 @default.
- W2066044088 hasConcept C62520636 @default.
- W2066044088 hasConcept C82706917 @default.
- W2066044088 hasConcept C97355855 @default.
- W2066044088 hasConceptScore W2066044088C113196181 @default.
- W2066044088 hasConceptScore W2066044088C121332964 @default.
- W2066044088 hasConceptScore W2066044088C145148216 @default.
- W2066044088 hasConceptScore W2066044088C176118016 @default.
- W2066044088 hasConceptScore W2066044088C178790620 @default.
- W2066044088 hasConceptScore W2066044088C184779094 @default.
- W2066044088 hasConceptScore W2066044088C185592680 @default.
- W2066044088 hasConceptScore W2066044088C192039680 @default.
- W2066044088 hasConceptScore W2066044088C22175881 @default.
- W2066044088 hasConceptScore W2066044088C30646810 @default.
- W2066044088 hasConceptScore W2066044088C43503373 @default.
- W2066044088 hasConceptScore W2066044088C43617362 @default.
- W2066044088 hasConceptScore W2066044088C521692839 @default.
- W2066044088 hasConceptScore W2066044088C547737533 @default.
- W2066044088 hasConceptScore W2066044088C548442186 @default.
- W2066044088 hasConceptScore W2066044088C62520636 @default.
- W2066044088 hasConceptScore W2066044088C82706917 @default.
- W2066044088 hasConceptScore W2066044088C97355855 @default.
- W2066044088 hasIssue "1" @default.
- W2066044088 hasLocation W20660440881 @default.
- W2066044088 hasOpenAccess W2066044088 @default.
- W2066044088 hasPrimaryLocation W20660440881 @default.
- W2066044088 hasRelatedWork W1970990872 @default.
- W2066044088 hasRelatedWork W1973786430 @default.
- W2066044088 hasRelatedWork W1986168417 @default.
- W2066044088 hasRelatedWork W1997388833 @default.
- W2066044088 hasRelatedWork W2011685800 @default.
- W2066044088 hasRelatedWork W2039627142 @default.
- W2066044088 hasRelatedWork W2061735615 @default.
- W2066044088 hasRelatedWork W2071586685 @default.
- W2066044088 hasRelatedWork W2077824680 @default.
- W2066044088 hasRelatedWork W2141940423 @default.
- W2066044088 hasVolume "11" @default.
- W2066044088 isParatext "false" @default.
- W2066044088 isRetracted "false" @default.
- W2066044088 magId "2066044088" @default.
- W2066044088 workType "article" @default.