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- W2066104382 abstract "Controlling critical dimensions of devices is a constant battle for the photolithography engineer. Current DUV lithographic process exposure latitude is typically 12 to 15% of the total dose. A third of this exposure latitude budget may be used up by a variable related to masking that has not previously received much attention. The emphasis on pellicle transmission has been focused on increasing the average transmission. Much less, attention has been paid to transmission uniformity. This paper explores the total demand on the photospeed latitude budget, the causes of pellicle transmission nonuniformity and examines reasonable expectations for pellicle performance. Modeling is used to examine how the two primary errors in pellicle manufacturing contribute to nonuniformity in transmission. World-class pellicle transmission uniformity standards are discussed and a comparison made between specifications of other components in the photolithographic process. Specifications for other materials or parameters are used as benchmarks to develop a proposed industry standard for pellicle transmission uniformity." @default.
- W2066104382 created "2016-06-24" @default.
- W2066104382 creator A5021315145 @default.
- W2066104382 creator A5090320356 @default.
- W2066104382 date "1998-12-18" @default.
- W2066104382 modified "2023-09-23" @default.
- W2066104382 title "Pellicle transmission uniformity requirements" @default.
- W2066104382 doi "https://doi.org/10.1117/12.332849" @default.
- W2066104382 hasPublicationYear "1998" @default.
- W2066104382 type Work @default.
- W2066104382 sameAs 2066104382 @default.
- W2066104382 citedByCount "1" @default.
- W2066104382 crossrefType "proceedings-article" @default.
- W2066104382 hasAuthorship W2066104382A5021315145 @default.
- W2066104382 hasAuthorship W2066104382A5090320356 @default.
- W2066104382 hasConcept C105487726 @default.
- W2066104382 hasConcept C127413603 @default.
- W2066104382 hasConcept C142362112 @default.
- W2066104382 hasConcept C153349607 @default.
- W2066104382 hasConcept C171250308 @default.
- W2066104382 hasConcept C192562407 @default.
- W2066104382 hasConcept C200601418 @default.
- W2066104382 hasConcept C204223013 @default.
- W2066104382 hasConcept C2777402240 @default.
- W2066104382 hasConcept C41008148 @default.
- W2066104382 hasConcept C49040817 @default.
- W2066104382 hasConcept C761482 @default.
- W2066104382 hasConcept C76155785 @default.
- W2066104382 hasConceptScore W2066104382C105487726 @default.
- W2066104382 hasConceptScore W2066104382C127413603 @default.
- W2066104382 hasConceptScore W2066104382C142362112 @default.
- W2066104382 hasConceptScore W2066104382C153349607 @default.
- W2066104382 hasConceptScore W2066104382C171250308 @default.
- W2066104382 hasConceptScore W2066104382C192562407 @default.
- W2066104382 hasConceptScore W2066104382C200601418 @default.
- W2066104382 hasConceptScore W2066104382C204223013 @default.
- W2066104382 hasConceptScore W2066104382C2777402240 @default.
- W2066104382 hasConceptScore W2066104382C41008148 @default.
- W2066104382 hasConceptScore W2066104382C49040817 @default.
- W2066104382 hasConceptScore W2066104382C761482 @default.
- W2066104382 hasConceptScore W2066104382C76155785 @default.
- W2066104382 hasLocation W20661043821 @default.
- W2066104382 hasOpenAccess W2066104382 @default.
- W2066104382 hasPrimaryLocation W20661043821 @default.
- W2066104382 hasRelatedWork W1999414715 @default.
- W2066104382 hasRelatedWork W2019510562 @default.
- W2066104382 hasRelatedWork W2051486873 @default.
- W2066104382 hasRelatedWork W2056046643 @default.
- W2066104382 hasRelatedWork W2063323845 @default.
- W2066104382 hasRelatedWork W2066104382 @default.
- W2066104382 hasRelatedWork W2092109624 @default.
- W2066104382 hasRelatedWork W2095314224 @default.
- W2066104382 hasRelatedWork W2122305933 @default.
- W2066104382 hasRelatedWork W4232858562 @default.
- W2066104382 isParatext "false" @default.
- W2066104382 isRetracted "false" @default.
- W2066104382 magId "2066104382" @default.
- W2066104382 workType "article" @default.