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• W2066136502 endingPage "1982" @default.
• W2066136502 startingPage "1977" @default.
• W2066136502 abstract "Current resist materials cannot simultaneously meet the sensitivity, resolution and line width roughness (LWR) requirements set out by the International Technology Roadmap for Semiconductors (ITRS) for the 32nm node and beyond. Here we present a fullerene-based, chemically amplified resist system, which demonstrates the potential to fulfill these requirements for next generation lithography. A chemically amplified fullerene resist was prepared, consisting of the derivative MF07-01, an epoxide crosslinker, and a photoacid generator, such as triarylsulfonium hexafluoroantimonate. The sensitivity of this resist was shown to be between 5 and 10 µC cm−2 at 20 keV for various combinations of post-application bake and post-exposure bake conditions. Using 30 keV electron beam exposure, sparse patterns with 15 nm resolution were demonstrated, whilst for dense patterns a half-pitch of 25 nm could be achieved. The LWR for the densely patterned features is ∼4 nm. The etch durability of the fullerene CA system was shown to be comparable to that of SAL601, a common novolac-based commercial resist, at almost four times that of silicon." @default.
• W2066136502 created "2016-06-24" @default.
• W2066136502 creator A5003017427 @default.
• W2066136502 creator A5009517267 @default.
• W2066136502 creator A5022398969 @default.
• W2066136502 creator A5059404790 @default.
• W2066136502 creator A5072913420 @default.
• W2066136502 creator A5080487700 @default.
• W2066136502 date "2008-07-09" @default.
• W2066136502 modified "2023-09-27" @default.
• W2066136502 title "Fullerene Resist Materials for the 32 nm Node and Beyond" @default.
• W2066136502 cites W11476871 @default.
• W2066136502 cites W1484003279 @default.
• W2066136502 cites W1567674067 @default.
• W2066136502 cites W1964723337 @default.
• W2066136502 cites W1965341910 @default.
• W2066136502 cites W1975879447 @default.
• W2066136502 cites W1990023710 @default.
• W2066136502 cites W1997096873 @default.
• W2066136502 cites W1997401972 @default.
• W2066136502 cites W1997985060 @default.
• W2066136502 cites W2004722766 @default.
• W2066136502 cites W2005917713 @default.
• W2066136502 cites W2007253151 @default.
• W2066136502 cites W2008035586 @default.
• W2066136502 cites W2008771485 @default.
• W2066136502 cites W2009508114 @default.
• W2066136502 cites W2012907465 @default.
• W2066136502 cites W2014446451 @default.
• W2066136502 cites W2014935324 @default.
• W2066136502 cites W2018858346 @default.
• W2066136502 cites W2022147811 @default.
• W2066136502 cites W2033984836 @default.
• W2066136502 cites W2035854312 @default.
• W2066136502 cites W2043349730 @default.
• W2066136502 cites W2050652072 @default.
• W2066136502 cites W2058122340 @default.
• W2066136502 cites W2058417939 @default.
• W2066136502 cites W2058571522 @default.
• W2066136502 cites W2058731643 @default.
• W2066136502 cites W2060609220 @default.
• W2066136502 cites W2062233194 @default.
• W2066136502 cites W2063902790 @default.
• W2066136502 cites W2070876453 @default.
• W2066136502 cites W2071175318 @default.
• W2066136502 cites W2071304171 @default.
• W2066136502 cites W2078416583 @default.
• W2066136502 cites W2082326299 @default.
• W2066136502 cites W2082596330 @default.
• W2066136502 cites W2082967701 @default.
• W2066136502 cites W2097135059 @default.
• W2066136502 cites W2100901479 @default.
• W2066136502 cites W2101245370 @default.
• W2066136502 cites W2102415385 @default.
• W2066136502 cites W2106014960 @default.
• W2066136502 cites W2110753191 @default.
• W2066136502 cites W2117059818 @default.
• W2066136502 cites W2121772044 @default.
• W2066136502 cites W2123711607 @default.
• W2066136502 cites W2123895137 @default.
• W2066136502 cites W2133126301 @default.
• W2066136502 cites W2133612771 @default.
• W2066136502 cites W2136013341 @default.
• W2066136502 cites W2156199992 @default.
• W2066136502 cites W2156896945 @default.
• W2066136502 cites W2163821097 @default.
• W2066136502 cites W2486119844 @default.
• W2066136502 cites W3101250852 @default.
• W2066136502 doi "https://doi.org/10.1002/adfm.200701155" @default.
• W2066136502 hasPublicationYear "2008" @default.
• W2066136502 type Work @default.
• W2066136502 sameAs 2066136502 @default.
• W2066136502 citedByCount "21" @default.
• W2066136502 countsByYear W20661365022012 @default.
• W2066136502 countsByYear W20661365022013 @default.
• W2066136502 countsByYear W20661365022014 @default.
• W2066136502 countsByYear W20661365022015 @default.
• W2066136502 countsByYear W20661365022016 @default.
• W2066136502 countsByYear W20661365022017 @default.
• W2066136502 countsByYear W20661365022022 @default.
• W2066136502 crossrefType "journal-article" @default.
• W2066136502 hasAuthorship W2066136502A5003017427 @default.
• W2066136502 hasAuthorship W2066136502A5009517267 @default.
• W2066136502 hasAuthorship W2066136502A5022398969 @default.
• W2066136502 hasAuthorship W2066136502A5059404790 @default.
• W2066136502 hasAuthorship W2066136502A5072913420 @default.
• W2066136502 hasAuthorship W2066136502A5080487700 @default.
• W2066136502 hasConcept C162862793 @default.
• W2066136502 hasConcept C162996421 @default.
• W2066136502 hasConcept C171250308 @default.
• W2066136502 hasConcept C178790620 @default.
• W2066136502 hasConcept C185592680 @default.
• W2066136502 hasConcept C192562407 @default.
• W2066136502 hasConcept C200274948 @default.
• W2066136502 hasConcept C204223013 @default.
• W2066136502 hasConcept C2779227376 @default.
• W2066136502 hasConcept C49040817 @default.
• W2066136502 hasConcept C53524968 @default.

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