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- W2066254497 abstract "Silicon micromachining technology is applied to fabricate free-standing YBCO structures for low-thermal-mass bolometer devices. The bolometric response of the devices is studied with chopped IR illumination at a wavelength of 1.3 μm. The micromachining process leads to an enhancement of sensitivity by more than one order of magnitude. The optical responsivity of the air-bridge bolometers measured at the midpoint of the resistive transition is 1.29 kV/W and the time constant is 81 μs. The optical noise equivalent power is 1.1×10−11 W/Hz1/2." @default.
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- W2066254497 date "1995-09-15" @default.
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- W2066254497 title "Epitaxial YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7−δ</sub>air‐bridge microbolometers on silicon substrates" @default.
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- W2066254497 doi "https://doi.org/10.1063/1.360745" @default.
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