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- W2066301079 abstract "Sequential lateral solidification (SLS) thin-film transistors (TFTs) offer higher performance than conventional excimer laser-annealed TFTs. However, their performance has an anisotropy originating from the polycrystalline silicon (p-Si) microstructure. The properties of TFTs with channel direction parallel to the lateral growth (parallel TFTs) are superior to those of TFTs with a perpendicular channel direction (perpendicular TFTs). The multi-channel structure proposed in this paper, which directly incorporates a parallel component in a perpendicular TFT, exhibits greatly improved properties. This MC structure can be applied not only to p-Si produced by SLS, but also to any material with property anisotropy." @default.
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- W2066301079 date "2010-11-15" @default.
- W2066301079 modified "2023-10-18" @default.
- W2066301079 title "A multi-channel structure to enhance the performance of a sequential lateral solidification thin-film transistor" @default.
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- W2066301079 doi "https://doi.org/10.1063/1.3515856" @default.
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