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- W2066312533 abstract "To study the feasibility of ArF excimer laser lithography, four prototype projection lenses have been designed-a monochromatic lens, an achromatic lens with separate elements, an achromatic lens including cemented elements, and a partially achromatized lens. From the viewpoint of the current technology limit of bandwidth narrowing of ArF excimer laser and accuracy of optical surface fabrication, the partially achromatized lens is found to offer the best solution. 0.18-µm resolution is confirmed using the fabricated prototype lens combined with the 10-pm bandwidth laser and Ag/Se-Ge inorganic resist. Quarter-micron lines-and-spaces pattern is obtained using a tri-layer resist system." @default.
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- W2066312533 date "1990-11-01" @default.
- W2066312533 modified "2023-09-26" @default.
- W2066312533 title "ArF Excimer Laser Projection Lithography Using Partially Achromatized Lens System" @default.
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- W2066312533 doi "https://doi.org/10.1143/jjap.29.2553" @default.
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