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- W2066394898 abstract "The carbon was incorporated in biaxial st-Si (stained Si) source/drain NMOSFET for channel strain enhancement. Due to ~52% lattice mismatch between silicon and carbon, the st-Si:C surface channel is under higher strain than that of st-Si, indicating that the carrier mobility can be enhanced significantly by theory. The resistance of st-Si:C with carbon increasing are similar with st-Si, and improved by the strain from underneath relaxed SiGe, as compared with Si:C/Si." @default.
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- W2066394898 date "2007-12-01" @default.
- W2066394898 modified "2023-09-23" @default.
- W2066394898 title "Strained-Si:C-source/drain NMOSFETs for channel strain enhancement" @default.
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- W2066394898 doi "https://doi.org/10.1109/isdrs.2007.4422399" @default.
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