Matches in SemOpenAlex for { <https://semopenalex.org/work/W2066534181> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W2066534181 endingPage "2317" @default.
- W2066534181 startingPage "2315" @default.
- W2066534181 abstract "Piezoelectric ZnO films on glass substrate were deposited by an RF mode ECR sputtering system. It was confirmed that in the ZnO films deposited by this system, a smooth sidewall structure of ZnO film without coarse columnar (fibre) grains was observed and that driving a 1.1 GHz fundamental mode of a Rayleigh SAW on ZnO/IDT/glass structure was possible at λ = 2.4 μm." @default.
- W2066534181 created "2016-06-24" @default.
- W2066534181 creator A5039401187 @default.
- W2066534181 creator A5043958113 @default.
- W2066534181 creator A5070660885 @default.
- W2066534181 date "1992-12-03" @default.
- W2066534181 modified "2023-09-25" @default.
- W2066534181 title "Characteristics of piezoelectric ZnO films deposited by RF mode electron cyclotron resonance sputtering system" @default.
- W2066534181 doi "https://doi.org/10.1049/el:19921490" @default.
- W2066534181 hasPublicationYear "1992" @default.
- W2066534181 type Work @default.
- W2066534181 sameAs 2066534181 @default.
- W2066534181 citedByCount "6" @default.
- W2066534181 crossrefType "journal-article" @default.
- W2066534181 hasAuthorship W2066534181A5039401187 @default.
- W2066534181 hasAuthorship W2066534181A5043958113 @default.
- W2066534181 hasAuthorship W2066534181A5070660885 @default.
- W2066534181 hasConcept C100082104 @default.
- W2066534181 hasConcept C111368507 @default.
- W2066534181 hasConcept C120665830 @default.
- W2066534181 hasConcept C121332964 @default.
- W2066534181 hasConcept C127313418 @default.
- W2066534181 hasConcept C132427895 @default.
- W2066534181 hasConcept C147120987 @default.
- W2066534181 hasConcept C159985019 @default.
- W2066534181 hasConcept C171250308 @default.
- W2066534181 hasConcept C175361016 @default.
- W2066534181 hasConcept C19067145 @default.
- W2066534181 hasConcept C192562407 @default.
- W2066534181 hasConcept C22423302 @default.
- W2066534181 hasConcept C2777289219 @default.
- W2066534181 hasConcept C39527238 @default.
- W2066534181 hasConcept C46244369 @default.
- W2066534181 hasConcept C49040817 @default.
- W2066534181 hasConcept C61427134 @default.
- W2066534181 hasConcept C62520636 @default.
- W2066534181 hasConceptScore W2066534181C100082104 @default.
- W2066534181 hasConceptScore W2066534181C111368507 @default.
- W2066534181 hasConceptScore W2066534181C120665830 @default.
- W2066534181 hasConceptScore W2066534181C121332964 @default.
- W2066534181 hasConceptScore W2066534181C127313418 @default.
- W2066534181 hasConceptScore W2066534181C132427895 @default.
- W2066534181 hasConceptScore W2066534181C147120987 @default.
- W2066534181 hasConceptScore W2066534181C159985019 @default.
- W2066534181 hasConceptScore W2066534181C171250308 @default.
- W2066534181 hasConceptScore W2066534181C175361016 @default.
- W2066534181 hasConceptScore W2066534181C19067145 @default.
- W2066534181 hasConceptScore W2066534181C192562407 @default.
- W2066534181 hasConceptScore W2066534181C22423302 @default.
- W2066534181 hasConceptScore W2066534181C2777289219 @default.
- W2066534181 hasConceptScore W2066534181C39527238 @default.
- W2066534181 hasConceptScore W2066534181C46244369 @default.
- W2066534181 hasConceptScore W2066534181C49040817 @default.
- W2066534181 hasConceptScore W2066534181C61427134 @default.
- W2066534181 hasConceptScore W2066534181C62520636 @default.
- W2066534181 hasIssue "25" @default.
- W2066534181 hasLocation W20665341811 @default.
- W2066534181 hasOpenAccess W2066534181 @default.
- W2066534181 hasPrimaryLocation W20665341811 @default.
- W2066534181 hasRelatedWork W1995810423 @default.
- W2066534181 hasRelatedWork W2018231769 @default.
- W2066534181 hasRelatedWork W2043761547 @default.
- W2066534181 hasRelatedWork W2159138826 @default.
- W2066534181 hasRelatedWork W2316948141 @default.
- W2066534181 hasRelatedWork W2373012329 @default.
- W2066534181 hasRelatedWork W2373579184 @default.
- W2066534181 hasRelatedWork W2526521535 @default.
- W2066534181 hasRelatedWork W2617606432 @default.
- W2066534181 hasRelatedWork W2188856160 @default.
- W2066534181 hasVolume "28" @default.
- W2066534181 isParatext "false" @default.
- W2066534181 isRetracted "false" @default.
- W2066534181 magId "2066534181" @default.
- W2066534181 workType "article" @default.