Matches in SemOpenAlex for { <https://semopenalex.org/work/W2066575745> ?p ?o ?g. }
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- W2066575745 endingPage "508" @default.
- W2066575745 startingPage "506" @default.
- W2066575745 abstract "A new process technology has been demonstrated that successfully addresses an urgent challenge in silicide technology scaling: the formation of low-resistivity TiSi/sub 2/ on sub-half-micrometer polysilicon lines. The key idea is the use of a TiN cap during the silicide process to minimize contaminants and stress in the film. No complex process steps have been added, and the thermal budget actually has been reduced, allowing for easy integration into standard CMOS technology. The new technology enables low sheet resistance values to be attained for scaled-down TiSi/sub 2/ thicknesses on sub-half-micrometer geometries, and thus, is eminently suited for scaling TiSi/sub 2/ technology." @default.
- W2066575745 created "2016-06-24" @default.
- W2066575745 creator A5007645295 @default.
- W2066575745 creator A5007813561 @default.
- W2066575745 creator A5090442459 @default.
- W2066575745 date "1996-11-01" @default.
- W2066575745 modified "2023-09-26" @default.
- W2066575745 title "Use of a TiN cap to attain low sheet resistance for scaled TiSi2 on sub-half-micrometer polysilicon lines" @default.
- W2066575745 cites W1984781615 @default.
- W2066575745 cites W2030096674 @default.
- W2066575745 cites W2119193106 @default.
- W2066575745 cites W2540531812 @default.
- W2066575745 doi "https://doi.org/10.1109/55.541763" @default.
- W2066575745 hasPublicationYear "1996" @default.
- W2066575745 type Work @default.
- W2066575745 sameAs 2066575745 @default.
- W2066575745 citedByCount "12" @default.
- W2066575745 crossrefType "journal-article" @default.
- W2066575745 hasAuthorship W2066575745A5007645295 @default.
- W2066575745 hasAuthorship W2066575745A5007813561 @default.
- W2066575745 hasAuthorship W2066575745A5090442459 @default.
- W2066575745 hasConcept C119599485 @default.
- W2066575745 hasConcept C127413603 @default.
- W2066575745 hasConcept C171250308 @default.
- W2066575745 hasConcept C171635847 @default.
- W2066575745 hasConcept C173118649 @default.
- W2066575745 hasConcept C191897082 @default.
- W2066575745 hasConcept C192562407 @default.
- W2066575745 hasConcept C2524010 @default.
- W2066575745 hasConcept C2779227376 @default.
- W2066575745 hasConcept C2780901251 @default.
- W2066575745 hasConcept C33923547 @default.
- W2066575745 hasConcept C46362747 @default.
- W2066575745 hasConcept C49040817 @default.
- W2066575745 hasConcept C525849907 @default.
- W2066575745 hasConcept C544956773 @default.
- W2066575745 hasConcept C61696701 @default.
- W2066575745 hasConcept C66825105 @default.
- W2066575745 hasConcept C69990965 @default.
- W2066575745 hasConcept C78519656 @default.
- W2066575745 hasConcept C99844830 @default.
- W2066575745 hasConceptScore W2066575745C119599485 @default.
- W2066575745 hasConceptScore W2066575745C127413603 @default.
- W2066575745 hasConceptScore W2066575745C171250308 @default.
- W2066575745 hasConceptScore W2066575745C171635847 @default.
- W2066575745 hasConceptScore W2066575745C173118649 @default.
- W2066575745 hasConceptScore W2066575745C191897082 @default.
- W2066575745 hasConceptScore W2066575745C192562407 @default.
- W2066575745 hasConceptScore W2066575745C2524010 @default.
- W2066575745 hasConceptScore W2066575745C2779227376 @default.
- W2066575745 hasConceptScore W2066575745C2780901251 @default.
- W2066575745 hasConceptScore W2066575745C33923547 @default.
- W2066575745 hasConceptScore W2066575745C46362747 @default.
- W2066575745 hasConceptScore W2066575745C49040817 @default.
- W2066575745 hasConceptScore W2066575745C525849907 @default.
- W2066575745 hasConceptScore W2066575745C544956773 @default.
- W2066575745 hasConceptScore W2066575745C61696701 @default.
- W2066575745 hasConceptScore W2066575745C66825105 @default.
- W2066575745 hasConceptScore W2066575745C69990965 @default.
- W2066575745 hasConceptScore W2066575745C78519656 @default.
- W2066575745 hasConceptScore W2066575745C99844830 @default.
- W2066575745 hasIssue "11" @default.
- W2066575745 hasLocation W20665757451 @default.
- W2066575745 hasOpenAccess W2066575745 @default.
- W2066575745 hasPrimaryLocation W20665757451 @default.
- W2066575745 hasRelatedWork W1946248301 @default.
- W2066575745 hasRelatedWork W1994603333 @default.
- W2066575745 hasRelatedWork W2030118299 @default.
- W2066575745 hasRelatedWork W2036569220 @default.
- W2066575745 hasRelatedWork W2054483166 @default.
- W2066575745 hasRelatedWork W2066575745 @default.
- W2066575745 hasRelatedWork W2081564372 @default.
- W2066575745 hasRelatedWork W2108276075 @default.
- W2066575745 hasRelatedWork W2325019708 @default.
- W2066575745 hasRelatedWork W2186632883 @default.
- W2066575745 hasVolume "17" @default.
- W2066575745 isParatext "false" @default.
- W2066575745 isRetracted "false" @default.
- W2066575745 magId "2066575745" @default.
- W2066575745 workType "article" @default.