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- W2066666918 abstract "A nuclear microprobe has been used in the study of inter-diffusion between Germanium and Palladium in a lateral diffusion couple by means of microbeam Rutherford backscattering spectrometry (μRBS). When a Ge island 65 nm thick was deposited onto a continuous Pd film 50 nm thick and annealed at 300oC for 30 min, the ratio between Pd and Ge measured by μRBS as a function of position, implies that possibly all five phases depicted on the phase diagram (PdGe, Pd2Ge, Pd5Ge2, Pd3Ge and Pd5Ge) form in the region in and around the island due to lateral diffusion of primarily the Ge. Investigation of concentration as a function of depth within the thin films revealed what appears to be an unexpected concentration gradient. Even though information regarding film composition could have been obtained using other techniques, the presence of the concentration gradient could only have been detected using μRBS, thus illustrating the power of this technique in lateral diffusion studies." @default.
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- W2066666918 date "1999-09-01" @default.
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- W2066666918 title "Study of Pd/Ge interaction in a lateral diffusion couple by microbeam Rutherford backscattering spectrometry" @default.
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- W2066666918 doi "https://doi.org/10.1016/s0168-583x(99)00307-9" @default.
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