Matches in SemOpenAlex for { <https://semopenalex.org/work/W2066697223> ?p ?o ?g. }
Showing items 1 to 67 of
67
with 100 items per page.
- W2066697223 endingPage "167" @default.
- W2066697223 startingPage "164" @default.
- W2066697223 abstract "In this study we investigate the appearance of etch pits and their effect on the ECV doping profiles of PM-HEMT structures grown by MOCVD and MBE. In some samples, etch-pits were observed after the etching of only 20 nm of the top layer. The observed pits had a circular pattern with diameter ranging from 2 to 25 μm. Study of these patterns by atomic force microscopy (AFM) showed that they are holes with a depth varying from 0.3 to 2 μm. The contribution of this hole area in the capacitance measurement during the ECV process results in the reduction and broadening of the observed peaks and in non reproducible profiling across the wafer. The dependence of the density and dimensions of the etch-pits on the etching depth are also presented." @default.
- W2066697223 created "2016-06-24" @default.
- W2066697223 creator A5032569849 @default.
- W2066697223 creator A5046522794 @default.
- W2066697223 creator A5052312679 @default.
- W2066697223 creator A5053664471 @default.
- W2066697223 date "2001-03-01" @default.
- W2066697223 modified "2023-09-27" @default.
- W2066697223 title "Selective etching during the electrochemical C-V profiling of PM-HEMTs" @default.
- W2066697223 cites W2004625568 @default.
- W2066697223 cites W2047602187 @default.
- W2066697223 cites W2326223369 @default.
- W2066697223 doi "https://doi.org/10.1016/s0921-5107(00)00611-5" @default.
- W2066697223 hasPublicationYear "2001" @default.
- W2066697223 type Work @default.
- W2066697223 sameAs 2066697223 @default.
- W2066697223 citedByCount "0" @default.
- W2066697223 crossrefType "journal-article" @default.
- W2066697223 hasAuthorship W2066697223A5032569849 @default.
- W2066697223 hasAuthorship W2066697223A5046522794 @default.
- W2066697223 hasAuthorship W2066697223A5052312679 @default.
- W2066697223 hasAuthorship W2066697223A5053664471 @default.
- W2066697223 hasConcept C100460472 @default.
- W2066697223 hasConcept C111919701 @default.
- W2066697223 hasConcept C147789679 @default.
- W2066697223 hasConcept C171250308 @default.
- W2066697223 hasConcept C17525397 @default.
- W2066697223 hasConcept C185592680 @default.
- W2066697223 hasConcept C187191949 @default.
- W2066697223 hasConcept C192562407 @default.
- W2066697223 hasConcept C2779227376 @default.
- W2066697223 hasConcept C41008148 @default.
- W2066697223 hasConcept C49040817 @default.
- W2066697223 hasConcept C52859227 @default.
- W2066697223 hasConceptScore W2066697223C100460472 @default.
- W2066697223 hasConceptScore W2066697223C111919701 @default.
- W2066697223 hasConceptScore W2066697223C147789679 @default.
- W2066697223 hasConceptScore W2066697223C171250308 @default.
- W2066697223 hasConceptScore W2066697223C17525397 @default.
- W2066697223 hasConceptScore W2066697223C185592680 @default.
- W2066697223 hasConceptScore W2066697223C187191949 @default.
- W2066697223 hasConceptScore W2066697223C192562407 @default.
- W2066697223 hasConceptScore W2066697223C2779227376 @default.
- W2066697223 hasConceptScore W2066697223C41008148 @default.
- W2066697223 hasConceptScore W2066697223C49040817 @default.
- W2066697223 hasConceptScore W2066697223C52859227 @default.
- W2066697223 hasIssue "1-3" @default.
- W2066697223 hasLocation W20666972231 @default.
- W2066697223 hasOpenAccess W2066697223 @default.
- W2066697223 hasPrimaryLocation W20666972231 @default.
- W2066697223 hasRelatedWork W2058676402 @default.
- W2066697223 hasRelatedWork W2059363835 @default.
- W2066697223 hasRelatedWork W2139871202 @default.
- W2066697223 hasRelatedWork W2292675962 @default.
- W2066697223 hasRelatedWork W2329285141 @default.
- W2066697223 hasRelatedWork W2399397734 @default.
- W2066697223 hasRelatedWork W2462115696 @default.
- W2066697223 hasRelatedWork W2769410768 @default.
- W2066697223 hasRelatedWork W2902546961 @default.
- W2066697223 hasRelatedWork W4296250578 @default.
- W2066697223 hasVolume "80" @default.
- W2066697223 isParatext "false" @default.
- W2066697223 isRetracted "false" @default.
- W2066697223 magId "2066697223" @default.
- W2066697223 workType "article" @default.