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- W2066704101 abstract "The design selected for the microactuator is a three phase variable reluctance (VR) stepping motor with teeth. The stator consists of a flux guide, three groups of poles with teeth, and meander type coils for exciting each group of poles. The system’s traveler is built up by a flux guide and teeth. For a good actuator’s performance the electroplated magnetic structures’ properties have to be optimized. To reach a small air gap that all VR-motors require, the microactuator’s surface needs a very low roughness. Therefore, to fabricate the microactuator in thinfilm technology the most important steps are electroplating the structures and embedding these structures for final planarization." @default.
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- W2066704101 date "2001-06-01" @default.
- W2066704101 modified "2023-10-18" @default.
- W2066704101 title "Thinfilm technologies to fabricate a linear microactuator" @default.
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