Matches in SemOpenAlex for { <https://semopenalex.org/work/W2066720730> ?p ?o ?g. }
- W2066720730 endingPage "909" @default.
- W2066720730 startingPage "905" @default.
- W2066720730 abstract "Sputtering of nominal 2 μg/cm2 carbon foils by 20 keV and 40 keV Ar+ bombardment has been measured using thickness measurements derived from the angular scatter distribution of 2 keV protons transiting the foils. The total sputtering yield is observed to reach a constant rate of 3.5 atoms removed per incident Ar+ and is independent of both the foil thickness and the incident energy. This is attributed to a nearly constant deposited energy density at the entrance and exit surfaces, which results from a nuclear stopping power that varies little over the energy range of 6–40 keV. By extrapolating measured backsputtering yield data to the energies used in this study, we obtain a transmission sputtering yield of approximately 1.7. Holes were also formed in the foil, and the fraction of holes created by Ar+ bombardment linearly increases with increasing fluence above a threshold fluence of 4.5 × 1015 Ar+/cm2." @default.
- W2066720730 created "2016-06-24" @default.
- W2066720730 creator A5004015549 @default.
- W2066720730 creator A5053629621 @default.
- W2066720730 date "1997-05-01" @default.
- W2066720730 modified "2023-09-29" @default.
- W2066720730 title "Sputtering of thin carbon foils by 20 keV and 40 keV Ar+ bombardment" @default.
- W2066720730 cites W1592273269 @default.
- W2066720730 cites W1963639758 @default.
- W2066720730 cites W1978991012 @default.
- W2066720730 cites W1989443776 @default.
- W2066720730 cites W1992660466 @default.
- W2066720730 cites W1992885030 @default.
- W2066720730 cites W1993633882 @default.
- W2066720730 cites W1996833364 @default.
- W2066720730 cites W1997319160 @default.
- W2066720730 cites W2006550689 @default.
- W2066720730 cites W2010422606 @default.
- W2066720730 cites W2014027539 @default.
- W2066720730 cites W2016172433 @default.
- W2066720730 cites W2018612911 @default.
- W2066720730 cites W2029707800 @default.
- W2066720730 cites W2037282041 @default.
- W2066720730 cites W2047151254 @default.
- W2066720730 cites W2051674887 @default.
- W2066720730 cites W2057644748 @default.
- W2066720730 cites W2060142810 @default.
- W2066720730 cites W2069452104 @default.
- W2066720730 cites W2076930779 @default.
- W2066720730 cites W2092115237 @default.
- W2066720730 cites W2094355608 @default.
- W2066720730 cites W248404060 @default.
- W2066720730 cites W4230053467 @default.
- W2066720730 doi "https://doi.org/10.1016/s0168-583x(97)00079-7" @default.
- W2066720730 hasPublicationYear "1997" @default.
- W2066720730 type Work @default.
- W2066720730 sameAs 2066720730 @default.
- W2066720730 citedByCount "11" @default.
- W2066720730 countsByYear W20667207302012 @default.
- W2066720730 countsByYear W20667207302013 @default.
- W2066720730 countsByYear W20667207302016 @default.
- W2066720730 countsByYear W20667207302018 @default.
- W2066720730 countsByYear W20667207302019 @default.
- W2066720730 countsByYear W20667207302020 @default.
- W2066720730 crossrefType "journal-article" @default.
- W2066720730 hasAuthorship W2066720730A5004015549 @default.
- W2066720730 hasAuthorship W2066720730A5053629621 @default.
- W2066720730 hasConcept C104779481 @default.
- W2066720730 hasConcept C111337013 @default.
- W2066720730 hasConcept C113196181 @default.
- W2066720730 hasConcept C121332964 @default.
- W2066720730 hasConcept C134121241 @default.
- W2066720730 hasConcept C140205800 @default.
- W2066720730 hasConcept C145148216 @default.
- W2066720730 hasConcept C146904657 @default.
- W2066720730 hasConcept C159985019 @default.
- W2066720730 hasConcept C171250308 @default.
- W2066720730 hasConcept C184779094 @default.
- W2066720730 hasConcept C185544564 @default.
- W2066720730 hasConcept C185592680 @default.
- W2066720730 hasConcept C19067145 @default.
- W2066720730 hasConcept C191897082 @default.
- W2066720730 hasConcept C192562407 @default.
- W2066720730 hasConcept C204323151 @default.
- W2066720730 hasConcept C22078206 @default.
- W2066720730 hasConcept C22423302 @default.
- W2066720730 hasConcept C43617362 @default.
- W2066720730 hasConcept C547737533 @default.
- W2066720730 hasConcept C62520636 @default.
- W2066720730 hasConcept C7363328 @default.
- W2066720730 hasConceptScore W2066720730C104779481 @default.
- W2066720730 hasConceptScore W2066720730C111337013 @default.
- W2066720730 hasConceptScore W2066720730C113196181 @default.
- W2066720730 hasConceptScore W2066720730C121332964 @default.
- W2066720730 hasConceptScore W2066720730C134121241 @default.
- W2066720730 hasConceptScore W2066720730C140205800 @default.
- W2066720730 hasConceptScore W2066720730C145148216 @default.
- W2066720730 hasConceptScore W2066720730C146904657 @default.
- W2066720730 hasConceptScore W2066720730C159985019 @default.
- W2066720730 hasConceptScore W2066720730C171250308 @default.
- W2066720730 hasConceptScore W2066720730C184779094 @default.
- W2066720730 hasConceptScore W2066720730C185544564 @default.
- W2066720730 hasConceptScore W2066720730C185592680 @default.
- W2066720730 hasConceptScore W2066720730C19067145 @default.
- W2066720730 hasConceptScore W2066720730C191897082 @default.
- W2066720730 hasConceptScore W2066720730C192562407 @default.
- W2066720730 hasConceptScore W2066720730C204323151 @default.
- W2066720730 hasConceptScore W2066720730C22078206 @default.
- W2066720730 hasConceptScore W2066720730C22423302 @default.
- W2066720730 hasConceptScore W2066720730C43617362 @default.
- W2066720730 hasConceptScore W2066720730C547737533 @default.
- W2066720730 hasConceptScore W2066720730C62520636 @default.
- W2066720730 hasConceptScore W2066720730C7363328 @default.
- W2066720730 hasLocation W20667207301 @default.
- W2066720730 hasOpenAccess W2066720730 @default.
- W2066720730 hasPrimaryLocation W20667207301 @default.
- W2066720730 hasRelatedWork W1970800609 @default.
- W2066720730 hasRelatedWork W1987015944 @default.