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- W2066815560 abstract "A laser vibrometer system to examine the dynamic modal analysis of resonant micromechanical structuresDavid WoodSchool of Engineering, University of Durham, South Road, Durham, DHI 3LE, EnglandJim BurdessDepartment of Mechanical Engineering, University of Newcastle-upon-Tyne, Stephenson Building, Newcastle-upon-Tyne, NEI 8ST, EnglandRobert Pitcher, Alun Harris and Jane CruickshankDepartment of Electrical and Electronic Engineering, University of Newcastle-upon-Tyne, Merz Court, Newcastle-upon-Tyne, NE1 7RU, EnglandABSTRACTAn interferometric system is described which can measure the dynamic performance ofmicromechanical structures. Modesof vibration and resonant frequencies are calculated for cantilevers and bridges which have been formed from boron-dopedsilicon. It is shown that a cantilever can be described by a beam model, whereas the bridge fits more appropriately to stringbehaviour. This phenomenon is explained by a cantilever, after annealing, being able to relieve the tension introduced atthe doping stage. The fixed structure of the bridge is unable to accomodate this, however, and the doping-induced tensionbecomes the dominant factor in the structure's behaviour.Keywords: microengineering, micromechanical, interferometry, vibrometer, modal analysis, tension, boron dopingLINTRODUCTION" @default.
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- W2066815560 date "1995-09-19" @default.
- W2066815560 modified "2023-09-26" @default.
- W2066815560 title "<title>Laser vibrometer system to examine the dynamic modal analysis of resonant micromechanical structures</title>" @default.
- W2066815560 doi "https://doi.org/10.1117/12.221277" @default.
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