Matches in SemOpenAlex for { <https://semopenalex.org/work/W2066857588> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2066857588 abstract "The electron distribution in extreme ultraviolet (EUV) photomask and its impact on patterning quality are investigated by Monte Carlo simulation and experiments. The simulation of electron ray tracing was accomplished using geant4 software to investigate the electron scattering properties within ArF and EUV photomask. The authors showed that EUV photomask has an additional electron distribution in the range of 2 μm, and that it is generated by the transverse propagation of electrons at the boundary of the Mo and Si layers. Furthermore, the specific electron distribution of EUV photomask results in a size error of the measured pattern, with respect to the design size, according to pattern density and electron dose. To correct this size error, the authors propose the use of an electron beam (100 keV), or H+ ion beam (50 keV), or a mask-process-correction based on data biasing." @default.
- W2066857588 created "2016-06-24" @default.
- W2066857588 creator A5053863446 @default.
- W2066857588 creator A5058317709 @default.
- W2066857588 creator A5086270570 @default.
- W2066857588 date "2014-05-23" @default.
- W2066857588 modified "2023-09-26" @default.
- W2066857588 title "Electron scattering analysis based on electron ray-tracing in extreme ultraviolet photomask" @default.
- W2066857588 cites W1996900454 @default.
- W2066857588 cites W2000304317 @default.
- W2066857588 cites W2005524175 @default.
- W2066857588 cites W2007602268 @default.
- W2066857588 cites W2010145107 @default.
- W2066857588 cites W2024172140 @default.
- W2066857588 cites W2031298982 @default.
- W2066857588 cites W2032757619 @default.
- W2066857588 cites W2032959679 @default.
- W2066857588 cites W2033557105 @default.
- W2066857588 cites W2033880238 @default.
- W2066857588 cites W2040226967 @default.
- W2066857588 cites W2050323439 @default.
- W2066857588 cites W2057279615 @default.
- W2066857588 cites W2061772603 @default.
- W2066857588 cites W2073745769 @default.
- W2066857588 cites W2080368958 @default.
- W2066857588 cites W2083005253 @default.
- W2066857588 cites W2087543316 @default.
- W2066857588 cites W2089415989 @default.
- W2066857588 cites W2093049956 @default.
- W2066857588 cites W2093878811 @default.
- W2066857588 cites W2094119213 @default.
- W2066857588 cites W2122022010 @default.
- W2066857588 cites W2128158076 @default.
- W2066857588 cites W2145930431 @default.
- W2066857588 cites W2171618672 @default.
- W2066857588 cites W2975639389 @default.
- W2066857588 cites W4241974700 @default.
- W2066857588 doi "https://doi.org/10.1116/1.4878943" @default.
- W2066857588 hasPublicationYear "2014" @default.
- W2066857588 type Work @default.
- W2066857588 sameAs 2066857588 @default.
- W2066857588 citedByCount "2" @default.
- W2066857588 countsByYear W20668575882019 @default.
- W2066857588 countsByYear W20668575882022 @default.
- W2066857588 crossrefType "journal-article" @default.
- W2066857588 hasAuthorship W2066857588A5053863446 @default.
- W2066857588 hasAuthorship W2066857588A5058317709 @default.
- W2066857588 hasAuthorship W2066857588A5086270570 @default.
- W2066857588 hasConcept C120665830 @default.
- W2066857588 hasConcept C121332964 @default.
- W2066857588 hasConcept C121483023 @default.
- W2066857588 hasConcept C146024833 @default.
- W2066857588 hasConcept C147120987 @default.
- W2066857588 hasConcept C14737013 @default.
- W2066857588 hasConcept C162996421 @default.
- W2066857588 hasConcept C171250308 @default.
- W2066857588 hasConcept C185544564 @default.
- W2066857588 hasConcept C192562407 @default.
- W2066857588 hasConcept C200274948 @default.
- W2066857588 hasConcept C2779227376 @default.
- W2066857588 hasConcept C520434653 @default.
- W2066857588 hasConcept C53524968 @default.
- W2066857588 hasConcept C95312477 @default.
- W2066857588 hasConceptScore W2066857588C120665830 @default.
- W2066857588 hasConceptScore W2066857588C121332964 @default.
- W2066857588 hasConceptScore W2066857588C121483023 @default.
- W2066857588 hasConceptScore W2066857588C146024833 @default.
- W2066857588 hasConceptScore W2066857588C147120987 @default.
- W2066857588 hasConceptScore W2066857588C14737013 @default.
- W2066857588 hasConceptScore W2066857588C162996421 @default.
- W2066857588 hasConceptScore W2066857588C171250308 @default.
- W2066857588 hasConceptScore W2066857588C185544564 @default.
- W2066857588 hasConceptScore W2066857588C192562407 @default.
- W2066857588 hasConceptScore W2066857588C200274948 @default.
- W2066857588 hasConceptScore W2066857588C2779227376 @default.
- W2066857588 hasConceptScore W2066857588C520434653 @default.
- W2066857588 hasConceptScore W2066857588C53524968 @default.
- W2066857588 hasConceptScore W2066857588C95312477 @default.
- W2066857588 hasIssue "4" @default.
- W2066857588 hasLocation W20668575881 @default.
- W2066857588 hasOpenAccess W2066857588 @default.
- W2066857588 hasPrimaryLocation W20668575881 @default.
- W2066857588 hasRelatedWork W2020026362 @default.
- W2066857588 hasRelatedWork W2029848574 @default.
- W2066857588 hasRelatedWork W2066857588 @default.
- W2066857588 hasRelatedWork W2078844371 @default.
- W2066857588 hasRelatedWork W2082111913 @default.
- W2066857588 hasRelatedWork W2310236214 @default.
- W2066857588 hasRelatedWork W2520043551 @default.
- W2066857588 hasRelatedWork W2939774687 @default.
- W2066857588 hasRelatedWork W2990131135 @default.
- W2066857588 hasRelatedWork W3053914760 @default.
- W2066857588 hasVolume "32" @default.
- W2066857588 isParatext "false" @default.
- W2066857588 isRetracted "false" @default.
- W2066857588 magId "2066857588" @default.
- W2066857588 workType "article" @default.