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- W20669688 abstract "Low power bridge type micro gas sensors were fabricated by micro machining technology with TMAH (Tetra Methyl Ammonium Hydroxide) solution. The sensing devices with different heater materials such as metal and poly-silicon were obtained using CMOS (Complementary Metal Oxide Semiconductor) compatible process. The tellurium films as a sensing layer were deposited on the micro machined substrate using shadow silicon mask. The low power micro gas sensors showed high sensitivity to NO with high speed. The pure tellurium film used micro gas sensor showed good sensitivity than transition metal (Pt, Ti) used tellurium film." @default.
- W20669688 created "2016-06-24" @default.
- W20669688 date "2008-01-31" @default.
- W20669688 modified "2023-10-18" @default.
- W20669688 title "Fabrication of low power NO micro gas senor by using CMOS compatible process" @default.
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- W20669688 doi "https://doi.org/10.5369/jsst.2008.17.1.035" @default.
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