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- W2066984910 abstract "Abstract This work deals with the results of studies of the processing and properties of α-C:H films obtained in a Hall accelerator plasma using hydrocarbons with various types of carbon atom bonds. According to the analysis of IR, UV and Raman spectra, it is suggested that in α-C:H films obtained from C2H2 sp2 bonds are predominant, in those obtained from CH4 both sp2 and sp3 bonds are predominant, while in the films obtained from C2H4 there are mostly sp3 bonds." @default.
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- W2066984910 date "1995-04-01" @default.
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- W2066984910 title "Deposition of α-C:H films in a Hall accelerator plasma" @default.
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- W2066984910 doi "https://doi.org/10.1016/0925-9635(94)05204-2" @default.
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